A vacuum sensor of large measurement scale based on rubbing-processed carbon nanotube films

• Autorzy: Su J. , He K.-X. , Guo D.-Z. , Xing Y.-J. , Zhang G.-M.

Warianty tytułu

PL

Czujnik próżniowy o szerokim zakresie pomiarów, oparty o przetarte błony z nanorurek węglowych

• Języki publikacji: EN

Abstrakty

EN

A miniature vacuum sensor with the widest vacuum measurement scale from 5×10-6 to 1×105 Pa by using carbon nanotube (CNT) films as the sensing material is presented. The CNT-films were mechanically rubbed onto quartz-glass substrates, with two electrodes evaporated at the two ends. It is found that the resistance of the CNT-films responses sensitively to the change of vacuum pressure. The mechanism of the sensors relates to the adsorption of water molecules which influences the electron transfer in CNTs and increases the CNT-junction resistivity.

PL

Zaproponowano miniaturowy czujnik próżniowy z szerokim zakresem pomiaru, od 5x10-6 do 1x105Pa, wykorzystujący, jako materiału czułego, błony z nanorurek węglowych (CNT). Błony przetarte są mechanicznie na podłożach ze szkła kwarcowego, na końcach których napylono dwie elektrody. Stwierdzono, że oporność CNT silnie zależy od ciśnienia próżni. Za mechanizm wrażliwości odpowiada adsorpcja cząsteczek wody, co wpływa na przepływ elektronów w CNT i powoduje wzrost oporności złącza CNT.

Słowa kluczowe

EN

carbon nanotube film; vacuum pressure; water adsorption

PL

błony z nanorurek węglowych; ciśnienie próżni; adsorpcja wody

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2013
• Tom: R. 89, nr 1b
• Strony: 134--137
• Opis fizyczny: Bibliogr. 23 poz., schem., wykr.

Twórcy

autor

Su J.

• Key Laboratory for Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, China

autor

He K.-X.

• Key Laboratory for Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, China

autor

Guo D.-Z.

• Key Laboratory for Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, China

autor

Xing Y.-J.

• Key Laboratory for Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, China

autor

Zhang G.-M.

• Key Laboratory for Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, China

Bibliografia

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