Irregular shaping of polystyrene nanosphere array by plasma etching

• Autorzy: Luo H. , Liu T. , Ma J. , Wang W. , Li H. , Wang P. , Bai J. , Jing G.
• Języki publikacji: EN

Abstrakty

EN

The morphology of nanospheres is crucial for designing the nanofabrication in the nanosphere lithography. Here, by plasma etching, the controllable tailoring of the nanosphere is realized and its morphology dependence on the initial shape, microscopic roughness, and the etching conditions is investigated quantitatively. The results show that the shape evolution strongly depends on the etching gas, power, and process duration. Particularly, the aspect ratio (diameter/height) significantly increases with violent etching, turning the spherical shape into tiny ellipsoidal nanoparticles. The findings are practical to the protocol of non-uniform etching of nanoobjects and provide the useful design tool for the device fabrication at nanoscale.

Słowa kluczowe

EN

polystyrene; nanosphere array; self-assembly

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2013
• Tom: Vol. 31, No. 3
• Strony: 331--337
• Opis fizyczny: Bibliogr. 29 poz., rys., tab., wykr.

Twórcy

autor

Luo H.

• Nano Biophotonics Center, National Key Laboratory and Incubation Base of Photoelectric Technology and Functional Materials, Department of Physics, Northwest University, 710069, Xi’an, China

autor

Liu T.

• Nano Biophotonics Center, National Key Laboratory and Incubation Base of Photoelectric Technology and Functional Materials, Department of Physics, Northwest University, 710069, Xi’an, China

autor

Ma J.

• Nano Biophotonics Center, National Key Laboratory and Incubation Base of Photoelectric Technology and Functional Materials, Department of Physics, Northwest University, 710069, Xi’an, China

autor

Wang W.

• School of Physics, Peking University, Beijing, 100871, China

autor

Li H.

• School of Physics, Peking University, Beijing, 100871, China

autor

Wang P.

• Northwest Institute for Nonferrous Metal Research (NIN), 710016, Xian, China

autor

Bai J.

• Nano Biophotonics Center, National Key Laboratory and Incubation Base of Photoelectric Technology and Functional Materials, Department of Physics, Northwest University, 710069, Xi’an, China
• Institute of Photonics and Photon-Technology, and Provincial Key Laboratory of Photoelectronic Technolony of Northwest University, 710069, Xian, China

autor

Jing G.

• Nano Biophotonics Center, National Key Laboratory and Incubation Base of Photoelectric Technology and Functional Materials, Department of Physics, Northwest University, 710069, Xian, China

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