Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps

• Autorzy: Razman Harriman , Awang Md Isa Azmi , Suadi Mohamad Kadim

Identyfikatory

DOI

10.15199/48.2022.03.14

Warianty tytułu

PL

Eksperymentalna ocena ilościowa uszkodzeń elektrostatycznych (ESD) w siatce binarnej z cechą przerw w skali nanometrycznej

• Języki publikacji: EN

Abstrakty

EN

A Binary reticle for lithography circuit patterning is extremerly senstive to electrostatic field. Damaged is seen on its feature after a breakdown voltage occurred between the metal lines. The experimental quantification of ESD for Binary reticle is performed by direct discharge to the feature of Critical Dimension (CD) of 80 nm to 160 nm. Its breakdown voltage correlated to CD but lower than international standard recommendations and observed Electric Field-Induced Migration (EFM) damaged at CD of < 110 nm but ESD for CD > 110 nm to 160 nm.

PL

Siatka binarna do wzorcowania obwodów litograficznych jest niezwykle wrażliwa na pole elektrostatyczne. Uszkodzenie jest widoczne na jego cechach po wystąpieniu napięcia przebicia między metalowymi liniami. Eksperymentalne oznaczenie ilościowe ESD dla siatki binarnej jest wykonywane przez bezpośrednie wyładowanie do cechy wymiaru krytycznego (CD) od 80 nm do 160 nm. Jego napięcie przebicia było skorelowane z CD, ale niższe niż zalecenia międzynarodowych standardów i zaobserwowano migrację indukowaną polem elektrycznym (EFM) uszkodzoną przy CD < 110 nm, ale ESD dla CD > 110 nm do 160 nm.

Słowa kluczowe

EN

ESD; EFM; Paschen law; townsend-fowler nordheim field emission

PL

wyładowanie elektrostatyczne ESD; siatka ekranująca; siatka binarna

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Przegląd Elektrotechniczny
• Rocznik: 2022
• Tom: R. 98, nr 3
• Strony: 60--63
• Opis fizyczny: Bibliogr. 20 poz., rys., tab.

Twórcy

autor

Razman Harriman

• SilTerra Malaysia Sdn Bhd

• https://orcid.org/0000-0002-9172-7605

autor

Awang Md Isa Azmi

• Universiti Teknikal Malaysia Melaka

• https://orcid.org/0000-0002-9404-5562

autor

Suadi Mohamad Kadim

• Universiti Malaysia Sarawak

Bibliografia

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