Application of anisotropic thin plate theory for development of displacements for silicon <111> crystals plates in cylindrical systems

• Autorzy: Javidinejad A.

Identyfikatory

DOI

10.1515/ijame-2016-0052

• Języki publikacji: EN

Abstrakty

EN

Silicon <111> crystal is one of the crystal orientations, which shows potential for application in micro device developments of pressure diaphragms for measurement purposes. To date, no theoretical basis has been examined to develop the deflections for computational analysis purposes [1]. This paper presents the development of the diaphragm deflections for Silicon <111> Crystal in Cylindrical coordinates system. The Silicon <111> crystal possesses transverse isotropic properties. Thus, an anisotropic thin plate theory is used here to develop the plate deflection. A numerical example is given to compare the theoretical results with Finite Element Analysis (FEA) results.

Słowa kluczowe

EN

anisotropic; pressure diaphragm; FEA; thin plate elasticity; transverse isotropic

PL

elastyczność; cienka płyta; ciśnienie

• Wydawca: Oficyna Wydawnicza Uniwersytetu Zielonogórskiego
• Czasopismo: International Journal of Applied Mechanics and Engineering
• Rocznik: 2016
• Tom: Vol. 21, no. 4
• Strony: 879--890
• Opis fizyczny: Bibliogr. 7 poz., rys., wykr.

Twórcy

autor

Javidinejad A.

• Department of Mechanical and Aerospace Engineering, University of Texas at Arlington, Arlington, TX 96019 United States of America

Bibliografia

• [1] Javidinejad A. (1999): Mechanical Design of Embeddable Micro-Smart Sensing Systems. – Ph.D. Dissertation, UTA.
• [2] Yang J. (2006): An Introduction to the Theory of Piezoelectricity. – London, U.K: Springer Science Publications.
• [3] Fumio S. (2012): Silicon Semiconductor Crystal Technology. – Elsevier Science Publishing.
• [4] Lee S., Park S., Kim J., Yi S. and Cho D. (2002): Surface/Bulk micromachined single-crystalline silicon microgyroscope. – IEEE/ASME Journal of Microelectromechanical Systems.
• [5] Bell T.E., Gennissen P.T.J., DeMunter D. and Kuhl M. (1996): Porous silicon as a sacrificial material. – IOP Journal of Micromechcal and Microengineering.
• [6] Buschow K.H. Jürgen, Cahn Robert W., Flemings Merton C., Ilschner B., Kramer Edward J., Mahajan S. and Veyssière P. (2011): Encyclopedia of Materials Science and Engineering. – Elsevier Ltd Publishing.
• [7] Aghalovyan L. (2015): Asymptotic Theory of Anisotropic Plates and Shells. – World Scientific Publishing Co Pte Ltd, Armenia.