Dual-axis test rig for Mems tilt sensors

• Autorzy: Łuczak S.

Identyfikatory

DOI

10.2478/mms-2014-0030

• Języki publikacji: EN

Abstrakty

EN

The paper addresses the problem of experimental studies of miniature tilt sensors based on low-range accelerometers belonging to Microelectromechanical Systems (MEMS). A custom computer controlled test rig is proposed, whose kinematics allows an arbitrary tilt angle to be applied (i.e. its two components: pitch and roll over the full angular range). The related geometrical relationships are presented along with the respective uncertainties resulting from their application. Metrological features of the test rig are carefully evaluated and briefly discussed. Accuracy of the test rig is expressed in terms of the respective uncertainties, as recommended by ISO; its scope of application as well as the related limitations are indicated. Even though the test rig is mostly composed of standard devices, like rotation stages and incremental angle encoder, its performance can be compared with specialized certified machines that are very expensive. Exemplary results of experimental studies of MEMS accelerometers realized by means of the test rig are presented and briefly discussed. Few ways of improving performance of the test rig are proposed.

Słowa kluczowe

EN

tilt sensor; accelerometer; MEMS; uncertainty of measurement; test rig

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2014
• Tom: Vol. 21, nr 2
• Strony: 351--362
• Opis fizyczny: Bibliogr. 25 poz., rys., tab., wykr., wzory

Twórcy

autor

Łuczak S.

• Warsaw University of Technology, Faculty of Mechatronics, Institute of Micromechanics and Photonics, Division of Design of Precision Devices, Boboli 8, 02-525 Warsaw, Poland

Bibliografia

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