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Abstrakty
To study the differences between long-pulse and short-pulse laser-induced damage in optical dielectric thin films, temperature distributions in single-layer HfO2 films, multi-layer HfO2/SiO2 films, and HfO2 films with high-absorptive inclusions induced by 1 ms and 10 ns lasers are analyzed based on the temperature field theory. Through our calculations, the damage property differences between millisecond and nanosecond lasers are summarized. The results for single-layer films show that 1 ms laser is easier to damage the substrate than 10 ns laser. For multi-layer films, the laser field effect is weaker when irradiating by 1 ms laser. Furthermore, when inclusions are introduced, the film is easier to be damaged by 10 ns laser, which means that 10 ns laser is more sensitive to the inclusions.
Słowa kluczowe
Czasopismo
Rocznik
Tom
Strony
783--793
Opis fizyczny
Bibliogr. 23 poz., rys., tab., wykr.
Twórcy
autor
- School of Science, Nanjing University of Science and Technology, Nanjing 210094, China
autor
autor
autor
autor
autor
Bibliografia
- [1] WANG X., ZHU D.H., SHEN Z.H., LU J., NI X.W., Surface damage morphology investigations of silicon under millisecond laser irradiation, Applied Surface Science 257(5), 2010, pp. 1583–1588.
- [2] WANG X., SHEN Z.H., LU J., NI X.W., Laser-induced damage threshold of silicon in millisecond,nanosecond, and picosecond regimes, Journal of Applied Physics 108(3), 2010, article 033103.
- [3] BIN WANG, YUAN QIN, XIAOWU NI, ZHONGHUA SHEN, JIAN LU, Effect of defects on long-pulse laser--induced damage of two kinds of optical thin films, Applied Optics 49(29), 2010, pp. 5537–5544.
- [4] XIAO-WU NI, JIAN LU, AN-ZHI HE, ZI MA, JIU-LING ZHOU, Plasma detection of laser field interaction with optical thin films, Optics Communication 90(4–6), 1992, pp. 270–272.
- [5] APFEL J.H., Optical coating design with reduced electric field intensity, Applied Optics 16(7), 1977, pp. 1880–1885.
- [6] HONG-BO HE, HAI-YANG HU, ZHI-PING TANG, ZHENG-XIU FAN, JIAN-DA SHAO, Laser-induced damage morphology of high-reflective optical coatings, Applied Surface Science 241(3–4), 2005,pp. 442–448.
- [7] WEIDONG GAO, MEIQIONG ZHAN, SHUHAI FAN, JANDA SHAO, ZHENG-XIU FAN, Laser-induced damage of Ta2O5/SiO2 narrow-band interference filters under different 1064 nm Nd:YAG laser modes, Applied Surface Science 250(1–4), 2005, pp. 195–202.
- [8] HAIYANG HU, ZHENGXIU FAN, FU LUO, Laser-induced damage of a 1064-nm ZnS/MgF2 narrow-band interference filter, Applied Optics 40(12), 2001, pp. 1950–1956.
- [9] WOOD R.M., Laser-Induced Damage of Optical Materials, IOP Publishing, Bristol and Philadelphia, 2003.
- [10] QIANG ZHAO, ZHOULING WU, THOMSEN M., YUE HAN, ZHENGXIU FAN, Interfacial effects on the transient temperature rise of multilayer coatings induced by a short-pulse laser irradiation, Proceedings of SPIE 3244, 1998, pp. 491–498.
- [11] ZHENGXIU FAN, QIAN ZHAO, ZHOULING WU, Temperature field design of optical thin film coatings, Proceedings of SPIE 2966, 1997, pp. 362–370.
- [12] XUEFEI TANG, ZHENGXIU FAN, ZHIJIANG WANG, Surface inclusion adhesion of optical coatings, Optical Engineering 33(10), 1994, pp. 3406–3410.
- [13] QIAN ZHAO, ZHENGXIU FAN, ZHIJIANG WANG, Role of interface absorption in laser-induced local heating of optical coatings, Optical Engineering 36(5), 1997, pp. 1530–1536.
- [14] MANSURIPUR M., CONNELL G.A.N., GOODMAN J.W., Laser-induced local heating of multilayers, Applied Optics 21(6), 1982, pp. 1106–1114.
- [15] GALLAIS L., COMMANDRÉ M., Photothermal deflection in multilayer coatings: modeling and experiment, Applied Optics 44(25), 2005, pp. 5230–5238.
- [16] GANG DAI, YANBEI CHEN, JIAN LU, ZHONGHUA SHEN, XIAOWU NI, Analysis of laser induced thermal mechanical relationship of HfO2/SiO2 high reflective optical thin film at 1064 nm, Chinese Optics Letters 7(7), 2009, pp. 601–604.
- [17] BERTUSSI B., NATOLI J.-Y., COMMANDRE M., RULLIER J.-L., BONNEAU F., COMBIS P., BOUCHUT P., Photothermal investigation of the laser-induced modification of a single gold nano-particle in a silica film, Optics Communications 254(4–6), 2005, pp. 299–309.
- [18] GALLAIS L., CAPOULADE J., WAGNER F., NATOLI J.Y., COMMANDRE M., Analysis of material modifications induced during laser damage in SiO2 thin films, Optics Communications 272(1), 2007, pp. 221–226.
- [19] JIANKE YAO, ZHENGXIU FAN, YUNXIA JIN, YUANAN ZHAO, HONGBO HE, JIANDA SHAO, Investigation of damage threshold to TiO2 coatings at different laser wavelength and pulse duration, Thin Solid Films 516(6), 2008, pp. 1237–1241.
- [20] GALLAIS L., AMRA C., NATOLI J.-Y., Calculated and thermally measured laser damage in metallic thin films as a function of pulse duration, Proceedings of SPIE 4932, 2003, pp. 16–25.
- [21] GUENTHER A.H., MCIVER J.K., Further studies on thermal aspects of inclusion-dominated processes in laser-induced thin film damage, Proceedings of SPIE 1270, 1990, pp. 66–71.
- [22] ZHU W.J., TAMAGAWA T., GIBSON M., FURUKAWA T., MA T.P., Effect of Al inclusion in HfO2 on the physical and electrical properties of the dielectrics, IEEE Electron Device Letters 23(11), 2002, pp. 649–651.
- [23] BIN WANG, HONGCHAO ZHANG, YUAN QIN, XI WANG, XIAOWU NI, ZHONGHUA SHEN, JIAN LU, Temperature field analysis of single layer TiO2 film components induced by long-pulse and short-pulse lasers, Applied Optics 50(20), 2011, pp. 3435–3441.
Typ dokumentu
Bibliografia
Identyfikator YADDA
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