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New type of Piezoresistive Pressure Sensors for Environments with Rapidly Changing Temperature

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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
The theoretical aspects of a new type of piezo-resistive pressure sensors for environments with rapidly changing temperatures are presented. The idea is that the sensor has two identical diaphragms which have different coefficients of linear thermal expansion. Therefore, when measuring pressure in environments with variable temperature, the diaphragms will have different deflection. This difference can be used to make appropriate correction of the sensor output signal and, thus, to increase accuracy of measurement. Since physical principles of sensors operation enable fast correction of the output signal, the sensor can be used in environments with rapidly changing temperature, which is its essential advantage. The paper presents practical implementation of the proposed theoretical aspects and the results of testing the developed sensor.
Słowa kluczowe
Rocznik
Strony
185--192
Opis fizyczny
Bibliogr. 21 poz., rys., wykr., wzory
Twórcy
autor
  • Lviv Polytechnic National University, Institute of Computer Technologies, Automation and Metrology, Kniazia Romana 19, Lviv, 79013, Ukraine
autor
  • Lviv Polytechnic National University, Institute of Computer Technologies, Automation and Metrology, Kniazia Romana 19, Lviv, 79013, Ukraine
autor
  • Lviv Polytechnic National University, Institute of Computer Science and Information Technology, Mytropolyta Andreja 5, Lviv, 79013, Ukraine
Bibliografia
  • [1] Mems for Automotive and Aerospace Applications (2013). Woodhead Publishing Series in Electronic and Optical Materials №32. Edited by M. Kraft and Neil M. White. Woodhead Publishing Limited.
  • [2] Markelov, I.G. (2009). Complex of pressures sensors for exploitation on the objects of atomic energy. Sensors and systems, 11/12, 24-25.
  • [3] Custom Pressure Sensors for the Aerospace Industry. Merit Sensor. https://meritsensor.com.
  • [4] Sensors for Aerospace & Defense. PCB Piezotronics. https://www.pcb.com/aerospace.
  • [5] Zhang, J., Liu, Q., Zhong, Y. (2008). A Tire Pressure Monitoring System Based on Wireless Sensor Networks Technology. International Conference on MultiMedia and Information Technology, 602-605.
  • [6] Lai, C.C., Dai, C.L., Chang, P.Z. (2005). A Piezoresistive Micro Pressure Sensor Fabricated by Commercial DPDM CMOS Process. Tamkang Journal of Science and Engineering, 8(1), 67-73.
  • [7] Kistler. Measure, analyze, innovate. https://www.kistler.com.
  • [8] Piezoresistive_vs_Piezoelectric. https://www.kulite.com.
  • [9] https://www.omega.com.
  • [10] Schatz, O. (2004). Recent trends in automotive sensors. Proc. of IEEE Sensors, 1, 236-239.
  • [11] Ko, H.S. (2007). Novel fabrication of a pressure sensor with polymer material and evaluation of its performance. Journal of Micromechanics and Microengineering, 17(8), 1640-1648.
  • [12] Mokrov, E.A., Belozubov, E.M., Tikhomirov, D.V. (2004). Minimizing the error of thin-film piezoresistive pressure sensors under the influence of non-stationary temperature. Sensors and systems, 1, 26-29.
  • [13] Mokrov, E.A., Vasilev, V.A., Belozubov, E.M. (2005). Application thermoprotective films for minimizing the influence of non-stationary temperature on thin-film piezoresistive pressure sensors. Sensors and systems, 9, 21-23.
  • [14] Kasten, K., Amelung, J., Mokwa, W. (2000). CMOS-compatible capacitive high temperature pressure sensors. Sensors and Actuators A: Physical, 85, 147-152.
  • [15] Pressure transducers and Melt Pressure Sensors. https://www.dynisco.com.
  • [16] Gridchin, A., Antonov, A.A. (2012). Termocompensation of tensoresistive sensors using bipolar junction transistor in extended temperature range. Conference Paper. Actual Problems of Electronics Instrument Engineering (APEIE), 11th International Conference.
  • [17] Peng, K.H., Uang, C.M. (2003). The temperature compensation of the silicon piezo-resistive pressure sensor using the half-bridge technique. Proc. of SPIE - The International Society for Optical Engineering, 534.
  • [18] Reverter, F., Horak, A., Bilas, G., Forner, V.G., Gasulla, M. (2009). Novel and low-cost temperature compensation technique for piezoresistive pressure sensors. XIX IMEKO World Congress. Fundamental and Applied Metrology, Lisboa, 2084-2087.
  • [19] Timoshenko, S.P., Woinowsky-Krieger, S. (1979). Theory of Plates and Shells. New York: McGraw-Hill.
  • [20] Tykhan, M. (2009). Method of measuring of dynamic pressure. Patent of Ukraine. No. 45961, Bul. No. 23.
  • [21] Tykhan, M. (2009). Method of measuring of dynamic pressure. Patent of Ukraine. No. 88936, Bul. No. 23.
Uwagi
PL
Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę (zadania 2017).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-9e22f02d-6c77-4118-adb3-0efba65a923d
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