Tytuł artykułu
Autorzy
Treść / Zawartość
Pełne teksty:
Identyfikatory
Warianty tytułu
Języki publikacji
Abstrakty
Featured with a higher velocity, increased power handling capability, and better aging behavior, surface transverse wave (STW) shows more promising prospects than Rayleigh wave nowadays in various sensing applications. The need to design, optimize, and fabricate the related devices motivates the development of modeling and simulation. For this reason, a three-dimensional (3D) finite element (FE) simulation of STW on quartz, considering the crystal cut angle and the electrode effects, is presented in this study. Firstly, we investigated the effects of quartz’s cut angle on the generated waves. Here, the polarized displacements were analyzed to distinguish the wave modes. Secondly, the investigations of the electrode effects on the polarized displacement, phase velocity, and electromechanical coupling factor (K2) were carried out, for which different material and thickness configurations for the electrodes were considered. Thirdly, to examine the excitation conditions of the generated waves, the admittance responses were inspected. The results showed that not only the crystal cut angle but also the density and the acoustic impedance of the interdigital transducer (IDT) material have a strong influence on the excited waves. This article is the first to analyze STWs considering quartz’s cut angle and electrode effect through a 3D FE model. It could provide a helpful and easy way to design, optimize, and fabricate the related surface acoustic wave devices.
Słowa kluczowe
Wydawca
Czasopismo
Rocznik
Tom
Strony
403--412
Opis fizyczny
Bibliogr. 29 poz., rys., tab., wykr.
Twórcy
autor
- School of Computer Science and Information Engineering Chongqing Technology and Business University Chongqing, China
- Chongqing Key Laboratory of Intelligent Perception and Blockchain Technology Chongqing Technology and Business University Chongqing, China
- Chongqing Engineering Laboratory for Detection, Control and Integrated System Chongqing Technology and Business University Chongqing, China
autor
- School of Computer Science and Information Engineering Chongqing Technology and Business University Chongqing, China
- Chongqing Key Laboratory of Intelligent Perception and Blockchain Technology Chongqing Technology and Business University Chongqing, China
autor
- School of Computer Science and Information Engineering Chongqing Technology and Business University Chongqing, China
- Chongqing Key Laboratory of Intelligent Perception and Blockchain Technology Chongqing Technology and Business University Chongqing, China
- Chongqing Engineering Laboratory for Detection, Control and Integrated System Chongqing Technology and Business University Chongqing, China
autor
- School of Computer Science and Information Engineering Chongqing Technology and Business University Chongqing, China
Bibliografia
- 1. Auld B.A., Gagnepain J.J. (1976), Horizontal shear surface waves on corrugated surfaces, Electronics Letters, 12(24): 650-651, doi: 10.1049/el:19760499.
- 2. Auld B.A., Renard A., Henaff J. (1982), STW resonances on corrugated plates of finite thickness, Electronics Letters, 18(4): 183-184, doi: 10.1049/el:19820126.
- 3. Auld B.A., Thompson D.F. (1987), Temperature compensation of surface transverse waves for stable oscillator applications, [in:] IEEE 1987 Ultrasonics Symposium, pp. 305-312, doi: 10.1109/ULTSYM.1987.198974.
- 4. Auld B.A., Yeh B.-H. (1979), Theory of surface skimming SH wave guidance by a corrugated surface, [in:] 1979 Ultrasonics Symposium, pp. 786-790, doi: 10.1109/ULTSYM.1979.197312.
- 5. Avramov I.D. (2000), High-performance surface transverse wave resonators in the lower GHz frequency range, International Journal of High Speed Electronics and Systems, 10(03): 735-792, doi: 10.1142/S0129156400000635.
- 6. Baghai-Wadji A.R., Seifert F., Anemogiannis K. (1988), Rigorous analysis of STWs in nonperiodic arrays including mechanical and electrical interactions, [in:] IEEE 1988 Ultrasonics Symposium Proceedings, pp. 303-306, doi: 10.1109/ULTSYM.1988.49388.
- 7. Bagwell T.L., Bray R.C. (1987), Novel surface transverse wave resonators with low loss and high Q, [in:] IEEE 1987 Ultrasonics Symposium, pp. 319-324, doi: 10.1109/ULTSYM.1987.198976.
- 8. Bigler E., Auld B.A., Ritz E., Sang E. (1991), An analysis of the influence of design parameters on the resonant frequency and Q-factor of surface transverse wave (STW) resonators, [in:] Proceedings of the 45th Annual Symposium on Frequency Control 1991, pp. 222-229, doi: 10.1109/FREQ.1991.145906.
- 9. Danicki E.J. (1983), Propagation of transverse surface acoustic waves in rotated Y-cut quartz substrates under heavy periodic metal electrodes, IEEE Transactions on Sonics and Ultrasonics, 30(5): 304-312, doi: 10.1109/T-SU.1983.31425.
- 10. Doberstein S., Veremeev I. (2019), STW resonators with the high quality factor and reduced sizes, [in:] 2019 IEEE International Ultrasonics Symposium (IUS), pp. 691-694, doi: 10.1109/ULTSYM.2019.8926223.
- 11. Fan Y., Ji X. (2018), A novel rotation speed measurement method based on surface acoustic wave, Acoustical Physics, 64(1): 122-128, doi: 10.1134/S1063771018010074.
- 12. Flory C.A., Baer R.L. (1987), Surface transverse wave mode analysis and coupling to interdigital transducers, [in:] IEEE 1987 Ultrasonics Symposium, pp. 313-318, doi: 10.1109/ULTSYM.1987.198975.
- 13. Fu C., Lee K.J., Eun K., Choa S.-H., Lee K., Yang S.S. (2016), Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application, Journal of Applied Physics, 120(2): 024501, doi: 10.1063/1.4955419.
- 14. Fu Y. et al. (2017), Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications, Progress in Materials Science, 89: 31-91, doi: 10.1016/j.pmatsci.2017.04.006.
- 15. Gaso Rocha M.I., Y. Jimeenez, Laurent F.A., Arnau A. (2013), Love wave biosensors: A review, [in:] State of the Art in Biosensors – General Aspects, Rinken T. [Ed.], IntechOpen, doi: 10.5772/53077.
- 16. Gavignet E., Ballandras S., Bigler E. (1995), Theoretical analysis of surface transverse waves propagating on a piezoelectric substrate under shallow groove or thin metal strip gratings, Journal of Applied Physics, 77(12): 6228-6233, doi: 10.1063/1.359590.
- 17. Hashimoto K.-y. (2000), Surface Acoustic Wave Devices in Telecommunications: Modelling and Simulation, Springer, New York.
- 18. Ji X., Fan Y., Chen J., Han T., Cai P. (2016), Passive wireless torque sensor based on surface transverse wave, IEEE Sensors Journal, 16(4): 888-894, doi: 10.1109/JSEN.2015.2499318.
- 19. Jiang C., Chen Y., Cho C. (2019), A three-dimensional finite element analysis model for SH-SAW torque sensors, Sensors, 19(19): 4290, doi: 10.3390/s19194290.
- 20. Park J., Kaynia A.M. (2017), FE simulation of steady state wave motion in solids combined with a PML approach, Procedia Engineering, 199: 1556-1561, doi: 10.1016/j.proeng.2017.09.054.
- 21. Rana L., Gupta R., Tomar M., Gupta V. (2018), Highly sensitive Love wave acoustic biosensor for uric acid, Sensors and Actuators B: Chemical, 261, 169-177, doi: 10.1016/j.snb.2018.01.122.
- 22. Ronnekleiv A. (1986), High Q resonators based on surface transverse waves, [in:] IEEE 1986 Ultrasonics Symposium, pp. 257-260, Williamsburg, doi: 10.1109/ULTSYM.1986.198748.
- 23. Stahl U. et al. (2018), Long-term capability of polymer-coated surface transverse wave sensors for distinguishing vapors of similar hydrocarbons, Sensors and Actuators B: Chemical, 274: 560-564, doi: 10.1016/j.snb.2018.08.013.
- 24. Strashilov V.L., Djordjev K.D., Boyanov B.I., Avramov I.D. (1997), A coupling-of-modes approach to the analysis of STW devices, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 44(3): 652-657, doi: 10.1109/58.658322.
- 25. Strashilov V.L., Yantchev V.M. (2005), Surface transverse waves: properties, devices, and analysis, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 52(5): 812-821, doi: 10.1109/TUFFC.2005.1503967.
- 26. Thompson D.F., Auld B.A. (1986), Surface transverse wave propagation under metal strip gratings, [in:] IEEE 1986 Ultrasonics Symposium, pp. 261-266, doi: 10.1109/ULTSYM.1986.198749.
- 27. Yantchev V.M., Strashilov V.L., Rapp M., Stahl U., Avramov I.D. (2002), Theoretical and experimental mass-sensitivity analysis of polymer-coated SAW and STW resonators for gas sensing applications, IEEE Sensors Journal, 2(4): 307-313, doi: 10.1109/JSEN.2002.804039.
- 28. Yatsuda H., Kogai T. (2006), 3F-3 liquid sensor using SAW and SH-SAW on quartz, [in:] 2006 IEEE Ultrasonics Symposium, pp. 552-555, doi: 10.1109/ULTSYM.2006.143.
- 29. Zhang J. et al. (2021), Real-time monitoring of HL-1 cell viscoelasticity for drug cardiotoxicity assessment using a Love wave biosensor, Journal of the Electrochemical Society, 168(10): 107504, doi: 10.1149/1945-7111/ac29de.
Uwagi
Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023). (PL)
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-9a80b625-9151-4fa3-a1af-f3eb7cfb9f96