Gas composition influence on the properties of boron-doped diamond films deposited on the fused silica

• Autorzy: Dec B. , Ficek M. , Rycewicz M. , Macewicz Ł. , Gnyba M. , Sawczak M. , Sobaszek M. , Bogdanowicz R.

Identyfikatory

DOI

10.2478/msp-2018-0046

• Języki publikacji: EN

Abstrakty

EN

The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C]_ppm ratio between 1000 and 10 000, fabricated in two molar ratios of CH₄–H₂ mixture (1 % and 4 %). Boron-doped diamond (BDD) film on the fused silica was presented as a conductive coating for optical and electronic purposes. The scanning electron microscopy images showed homogenous and polycrystalline surface morphology. The Raman spectroscopy confirmed the growth of sp³ diamond phase and sp² carbon phase, both regular and amorphous, on the grain boundaries, as well as the efficiency of boron doping. The sp³/sp² ratio was calculated using the Raman spectra deconvolution method. A high refractive index (in a range of 2.0 to 2.4 at λ = 550 nm) was achieved for BDD films deposited at 700 °C. The values of extinction coefficient were below 1.4 at λ = 550 nm, indicating low absorption of the film.

Słowa kluczowe

EN

microwave plasma chemical vapor deposition; boron-doped diamond; optical constants; fused silica

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2018
• Tom: Vol. 36, No. 2
• Strony: 288--296
• Opis fizyczny: Bibliogr. 40 poz., rys., tab.

Twórcy

autor

Dec B.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

autor

Ficek M.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

autor

Rycewicz M.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

autor

Macewicz Ł.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

autor

Gnyba M.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

autor

Sawczak M.

• Polish Academy of Sciences, The Szewalski Institute of Fluid-Flow Machinery, 14 Fiszera St., 80-231 Gdansk, Poland

autor

Sobaszek M.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

autor

Bogdanowicz R.

• Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., 80-233 Gdansk, Poland

Bibliografia

• [1] SUKHADOLAU A.V., IVAKIN E.V., RALCHENKO V.G., KHOMICH A.V., VLASOV A.V., POPOVICH A.F., Diam. Relat. Mater., 589 (2005), 3.
• [2] INIESTA J., MICHAUD P.A., PANIZZA M., CERISOLA G., ALDAZ A., COMNINELLIS C., Electrochim. Acta, 23 (2001), 3573.
• [3] ADAMSCHIK M., KUSTERER J., SCHMID P., SCHAD K.B., GROBE D., FLÖTER A., KOHN E., Diam. Relat. Mater., 672 (2002), 3.
• [4] PETRŽELA J., VYSKOČIL P., PROKOPEC J., 20th International Conference Radioelektronika 2010, 4 (2010), 217.
• [5] AMARAL M., DIAS A.G., GOMES P.S., LOPES M.A., SILVA R.F., SANTOS J.D., FERNANDES M.H., J. Biomed. Mater. Res. A, 1 (2008), 91.
• [6] SOBASZEK M., SKOWROŃSKI Ł., BOGDANOWICZ R., SIUZDAK K., CIROCKA A., ZIĘBA P., GNYBA M., NAPARTY M., GOŁUŃSKI Ł., PŁOTKA P., Opt. Mater., 42 (2015), 24.
• [7] WORT C.J.H., BALMER R.S., Mater. Today, 22 (2008), 1.
• [8] BOGDANOWICZ R., CZUPRYNIAK J., GNYBA M., RYL J., OSSOWSKI T., SOBASZEK M., SIEDLECKA E.M., DAROWICKI K., Sens. Actuat. B-Chem., 189 (2013), 30.
• [9] WĄSOWICZ M., FICEK M., WRÓBEL M.S., CHAKRABORTY R., FIXLER D., WIERZBA P., JĘDRZEJEWSKA-SZCZERSKA M., Materials, 4 (2017), 352.
• [10] BOGDANOWICZ R., SOBASZEK M., FICEK M., GNYBA M., RYL J., SIUZDAK K., BOCK W.J., SMIETANA M., J. Opt. Soc. Korea, 6 (2015), 705.
• [11] KOWALSKA M., FABISIAK K., WRZYSZCZYŃSKI A., BANASZAK A., SZYBOWICZ M., PAPROCKI K., BAŁA W., BYLICKI F., Mater. Sci.-Poland, 3 (2014), 475.
• [12] MILEWSKA D., KARPIENKO K., JĘDRZEJEWSKA-SZCZERSKA M., Diam. Relat. Mater., 64 (2016), 169.
• [13] JĘDRZEJEWSKA-SZCZERSKA M., KARPIENKO K., WRÓBEL M.S., TUCHIN V.V., Biosensors for Security and Bioterrorism Applications, Springer International Publishing, 2016.
• [14] FICEK M., SOBASZEK M., GNYBA M., RYL J., GOŁUŃSKI Ł., SMIETANA M., JASIŃSKI J., CABAN P., BOGDANOWICZ R., Appl. Surf. Sci., 387 (2016), 846.
• [15] LIAO X.Z., ZHANG R.J., LEE C.S., LEE S.T., LAM Y.W., Diam. Relat. Mater., 2 (1997), 521.
• [16] LU Y.-G., TURNER S., VERBEECK J., JANSSENS S.D., WAGNER P., HAENEN K., TENDELOO VAN G., Appl. Phys. Lett., 41907 (2012), 4.
• [17] KROMKA A., REZEK B., REMES Z., MICHALKA M., LEDINSKY M., ZEMEK J., POTMESIL J., VANECEK M., Chem. Vap. Depos., 181 (2008), 7.
• [18] POTOCKY S., KROMKA A., POTMESIL J., REMES Z., VORLICEK V., VANECEK M., MICHALKA M., Diam. Relat. Mater., 744 (2007), 4.
• [19] HU Z.G., HESS P., Appl. Phys. Lett., 81903 (2006), 8.
• [20] GAJEWSKI W., ACHATZ P., WILLIAMS O.A., HAENEN K., BUSTARRET E., STUTZMANN M., GARRIDO J.A., Phys. Rev. B, 45206 (2009), 4.
• [21] BENNET K.E., LEE K.H., KRUCHOWSKI J.N., CHANG S.-Y., MARSH M.P., ORSOW VAN A.A., PAEZ A., MANCIU F.S., Materials, 5726 (2013), 12.
• [22] ZIMMER A., WILLIAMS O.A., HAENEN K., TERRYN H., Appl. Phys. Lett., 131910 (2008), 13.
• [23] FICEK M., SANKARAN K.J., RYL J., BOGDANOWICZ R., LIN I.-N., HAENEN K., DAROWICKI K., Appl. Phys. Lett., 241906 (2016), 24.
• [24] BOGDANOWICZ R., ŚMIETANA M., GNYBA M., FICEK M., STRAŇÁK V., GOLUŃSKI Ł., SOBASZEK M., RYL J., Phys. Status Solidi A, 10 (2013), 1991.
• [25] STOTTER J., SHOW Y., WANG S., SWAIN G., Chem. Mater., 19 (2005), 4880.
• [26] BOGDANOWICZ R., SOBASZEK M., RYL J., GNYBA M., FICEK M., GOŁUŃSKI Ł., BOCK W.J., ŚMIETANA M., DAROWICKI K., Diam. Relat. Mater., 55 (2015), 52.
• [27] BENNET K.E., TOMSHINE J.R., MIN H.-K., MANCIU F.S., MARSH M.P., PAEK S.B., SETTELL M.L., NICOLAI E.N., BLAHA C.D., KOUZANI A.Z., CHANG S.-Y., LEE K.H., Front. Hum. Neurosci., 10 (2016), 102.
• [28] HEES J., KRIELE A., WILLIAMS O.A., Chem. Phys. Lett., 12 (2011), 1.
• [29] DYCHALSKA A., FABISIAK K., PAPROCKI K., DUDKOWIAK A., SZYBOWICZ M., Mater. Sci.-Poland, 620 (2016), 3.
• [30] PRAWER S., NEMANICH R.J., Philos. T. R. Soc. A, 1824 (2004), 2537.
• [31] BRUNET F., GERMI P., PERNET M., DENEUVILLE A., GHEERAERT E., MAMBOU J., Diam. Relat. Mater., 6 (1997), 774.
• [32] KRIVCHENKO V.A., LOPAEV D.V., MINAKOV P.V., PIROGOV V.G., RAKHIMOV A.T., SUETIN N.V., Tech. Phys., 11 (2007), 1471.
• [33] CHILDRES I., JAUREGUI L.A., PARK W., CAO H., CHEN Y.P., New Dev. Photon Mater. Res., 19 (2013), 1.
• [34] MAY P.W., LUDLOW W.J., HANNAWAY M., HEARD P.J., SMITH J.A., ROSSER K.N., Diam. Relat. Mater., 2 (2008), 105.
• [35] ALMEIDA E.C., TRAVA-AIROLDI V.J., BALDAN M.R., ROSOLEN J.M., FERREIRA N.G., J. Mater. Sci., 7 (2007), 2250.
• [36] FERRARI A.C., ROBERTSON J., Phys. Rev. B, 20 (2000), 14095.
• [37] YAMADA T., KIM J., ISHIHARA M., HASEGAWA M., J. Phys. Appl. Phys., 63001 (2013), 896.
• [38] BERNARD M., BARON C., DENEUVILLE A., Diam. Relat. Mater., 4 (2004), 896.
• [39] ZIELIŃSKI A., BOGDANOWICZ R., RYL J., BURCZYK L., DAROWICKI K., Appl. Phys. Lett., 13 (2014), 131908.
• [40] SOBASZEK M., SIUZDAK K., SKOWROŃSKI Ł., BOGDANOWICZ R., PLUCIŃSKI J., IOP Conf. Ser. Mater. Sci. Eng., 1 (2016), 12024.

Uwagi

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).