Generation of Large-area Arrays of Aperiodic Functional Micro/nano Structures Using Phase Shift Interferometry

• Autorzy: Pearly Princess J. , Alfred Kirubaraj A. , Christina Sophia S. , Senith S. , Jino Ramson S. R.

Identyfikatory

DOI

10.24425/ijet.2022.139853

• Języki publikacji: EN

Abstrakty

EN

Phase shift interferometry (PSI) derived from interference technique as greater surface characterization technique based on the interference information recorded during a controlled phase shift. This research shows the development of micro/nano structures using phase shift interferometry. (PSI) is the process of developing the complex pattern structure using variable phase angle between two or more beams aligned to obtain functional aperiodic arrays. We have designed and modelled the PSI and simulated through MATLAB in 2D and 3D pattern structures. The PSI was performed in two process analysis. First, without PSI referring normal interference technique. Second, with PSI referring position of laser beams in quadrant-based alignment. The obtained results show the minimum feature structure was measured as 12 nm. This feature size developed under phase shift interferometry (PSI) produces minimum feature size compared to the existing interferometry technique. This study gives the promising increased fabrication area could develop large area arrays structures.

Słowa kluczowe

EN

laser interference lithography; LIL; pattern structures; periodic patterns; aperiodic patterns; phase shift interferometry; PSI

• Wydawca: Polish Academy of Sciences, Committee of Electronics and Telecommunication
• Czasopismo: International Journal of Electronics and Telecommunications
• Rocznik: 2022
• Tom: Vol. 68, No. 1
• Strony: 91--96
• Opis fizyczny: Bibliogr. 16 poz., il., tab., wykr.

Twórcy

autor

Pearly Princess J.

• Institute of Technology and Sciences, Karunya Nagar, India

autor

Alfred Kirubaraj A.

• Institute of Technology and Sciences, Karunya Nagar, India

autor

Christina Sophia S.

• Institute of Technology and Sciences, Karunya Nagar, India

autor

Senith S.

• Institute of Technology and Sciences, Karunya Nagar, India

autor

Jino Ramson S. R.

• VIT Bhopal University, Bhopal, India

Bibliografia

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