Modeling and simulations of MEMS gyroscope with MATLAB/SIMULINK package

• Autorzy: Nazdrowicz J.
• Języki publikacji: EN

Abstrakty

EN

This paper presents developed mathematical model of MEMS gyroscope created in Matlab/SIMULINK environment. The model can be very useful for calculating MEMS gyroscope geometrical parameters. These parameters play very significant role, because they have huge and direct impact on device response, performance and further possibilities of application. Results of simulations are presented in this article separately for drive and sense direction. In addition there are also results in frequency domain presented. With all these results we obtain quick overview of behavior this kind of MEMS device and response characteristics.

Słowa kluczowe

EN

MEMS; gyroscope; angular velocity sensor; microelectromechanical systems; model simulation; microaccelerometer; MATLAB; SIMULINK; MEMS modeling; equivalent circuit model

PL

MEMS; żyroskop; czujnik prędkości kątowej; mikroukład elektromechaniczny; model symulacyjny; akcelerometr; MATLAB; SIMULINK; modelowanie MEMS; model obwodu zastępczego

• Wydawca: Lodz University of Technology. Department of Microelectronics and Computer Science
• Czasopismo: International Journal of Microelectronics and Computer Science
• Rocznik: 2017
• Tom: Vol. 8, nr 1
• Strony: 21--28
• Opis fizyczny: Bibliogr. 9 poz., rys., wykr.

Twórcy

autor

Nazdrowicz J.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland

Bibliografia

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• [3] C. Liu, Foundations of MEMS, Pearson Education Limited, India, 2012.
• [4] P. Singh, P. Gupta, P. Srivastava, R. Kumari Chaudhary, Design and modeling of MEMS capacitive gyroscope, International Conference on Energy Efficient Technologies for Sustainability, Nagercoil, India, pp. 907-911, 10-12 April 2013.
• [5] P. Verma, R. Gopal, S. Kumar Arya, Dynamic Characteristics of Vibratory Gyro-accelerometer, 5th International Conference on Computers and Devices for Communication (CODEC), Kolkata, India, 17-19 Dec. 2012.
• [6] P. Verma, R. Gopal, Arya , Sandeep K., Behavioral Simulation of a Non-resonant MEMS, Gyro-accelerometer, International Journal of Computer & Organization Trends, Volume 5, pp. 23-25, February 2014.
• [7] W. Geiger, W. U. Butt, A. Gaisser. J. Freeh, M. Braxmaier, T . Link, A. Kohne, P . Nommenson, H. Sandmaier, W. Lang, Decoupled Micro Gyros and the Design Principle DAVED, Sensors & Actuators A: Physical., vol. 95, no. 2-3, pp. 239- 249, 2002.
• [8] X. Z . Chi., Z. Y. Guo, Z. C. Yang, L. T. Lin, Q. C. Zhao, J . Cui. G. Z. Yan, Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork, Gyroscopes, IEEE Electron Devices, vol. 31, no. 1, 2010.
• [9] B. Friedland, M. Hutton, Theory and error analysis of vibrating-member gyroscopes, IEEE Trans. Autom. Control 23 (4), pp. 545-556, 1978.

Uwagi

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).