Finite Element Analysis of SAW Sensor with ZnO Substrate for Dichloromethane (DCM) Gas Detection

• Autorzy: Moustafa Mohamed , Laouini Ghaylen , Alzoubi Tariq

Identyfikatory

DOI

10.24425/aoa.2021.138135

• Języki publikacji: EN

Abstrakty

EN

A SAW gas sensor based on Zinc Oxide (ZnO) piezoelectric substrate is simulated and evaluated for the detection of the dichloromethane (DCM) volatile organic compound (VOC). The study is performed based on the finite element method (FEM) using COMSOL Multiphysics software. The obtained device response using the ZnO substrate is compared to the one using the typical lithium niobate (LiNbO₃) piezoelectric substrate. A thin film of polyisobutylene (PIB) membrane is selected to act as the sensing layer. The obtained results reveal a linear behaviour of the resonance frequency downshift (i.e., the sensor sensitivity) versus the investigated gas concentrations varying from 10 ppm to 100 ppm of DCM gas. Additionally, the sensor response is investigated by applying several thicknesses of PIB ranging from 0.3 µm to 1.0 µm. The observed sensor response shows less dependence on the PIB thickness using the ZnO substrate than the LiNbO₃ one.

Słowa kluczowe

EN

surface acoustic wave; SAW; gas sensors; VOCs; FEM modelling

• Wydawca: Instytut Podstawowych Problemów Techniki PAN ; Komitet Akustyki PAN ; Polskie Towarzystwo Akustyczne
• Czasopismo: Archives of Acoustics
• Rocznik: 2021
• Tom: Vol. 46, No. 3
• Strony: 419--426
• Opis fizyczny: Bibliogr. 38 poz., rys., tab., wykr.

Twórcy

autor

Moustafa Mohamed

• Department of Physics, School of Sciences and Engineering, The American University in Cairo, Egypt

autor

Laouini Ghaylen

• College of Engineering and Technology, American University of the Middle East, Kuwait

autor

Alzoubi Tariq

• College of Engineering and Technology, American University of the Middle East, Kuwait

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2021).