Surface morphology and optical properties of Al₂O₃ thin films deposited by ALD method

• Autorzy: Dobrzański L. A. , Szindler M. , Szindler M.M.
• Języki publikacji: EN

Abstrakty

EN

Purpose: The paper presents the results of investigations on the changes in surface morphology, roughness, and thickness of the prepared aluminium oxide thin films as dependent on conditions of the thin films preparation. Design/methodology/approach: Thin films have been prepared with use of atomic layer deposition (ALD) method. The changes of surface morphology have been observed in topographic images performed with the atomic force microscope (AFM). Obtained roughness parameters have been calculated with XEI Park Systems software. The thickness distribution have been measured with spectroscopic ellipsometry. The optical transmission spectra have been measured with UV-Vis spectrophotometry. Findings: Results and their analysis show that the atomic layer deposition method allows the deposition of homogenous thin films of Al2O3 with the desired geometric characteristics and good optical properties. Practical implications: The technology of atomic layer deposition of aluminium oxide thin films causes that mentioned thin films are good potential material for optics, optoelectronics and photovoltaics. Originality/value: The paper presents results of investigations on aluminum oxide thin films prepared with atomic layer deposition method on glass substrate.

Słowa kluczowe

EN

thin film; aluminum oxide; atomic force microscope; spectroscopic ellipsometry

PL

cienka powłoka; tlenek glinu; mikroskopia sił atomowych; elipsometria spektroskopowa

• Wydawca: International OCSCO World Press
• Czasopismo: Archives of Materials Science and Engineering
• Rocznik: 2015
• Tom: Vol. 73, nr 1
• Strony: 18--24
• Opis fizyczny: Bibliogr. 26 poz.

Twórcy

autor

Dobrzański L. A.

• Division of Materials Processing Technology and Computer Techniques in Materials Science, Institute of Engineering Materials and Biomaterials, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

autor

Szindler M.

• Division of Materials Processing Technology and Computer Techniques in Materials Science, Institute of Engineering Materials and Biomaterials, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

autor

Szindler M.M.

• Divsion of Metal and Polymer Materials Processing, Institute of Engineering Materials and Biomaterials, Silesian University of Technology, ul. Konarskiego 18a, 44-100 Gliwice, Poland

Bibliografia

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