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TiO2 thin films grown on SiO2–Si(111) by the reactive evaporation method

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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
TiO2 thin films were grown on silicon substrates using an electron-beam evaporator. Grainy TiO was used as the evaporation material. Temperature substrate during TiO2 growth was relatively low (about 150 °C), what is important for many optoelectronic devices and multilayers mirrors. High vacuum condition allows to maintain clean surfaces substrates before and during oxide growth. The morphology of titanium oxide thin films was ex situ investigated using atomic force microscopy operating in contact mode, X-ray photoelectron spectroscopy, X-ray powder diffractometry, and by means of a contact angle analyzer. The influence of annealing treatment and exposure to UV–VIS radiation on the morphology has been also discussed.
Czasopismo
Rocznik
Strony
99--107
Opis fizyczny
Bibliogr. 18 poz., rys., tab., wykr.
Twórcy
autor
  • Institute of Experimental Physics, University of Wrocław, plac Maxa Borna 9, 50-204 Wrocław, Poland
  • On research stay at Wrocław Research Centre EIT+, Stabłowicka 147, 54-066 Wrocław, Poland
  • Institute of Experimental Physics, University of Wrocław, plac Maxa Borna 9, 50-204 Wrocław, Poland
  • On research stay at Wrocław Research Centre EIT+, Stabłowicka 147, 54-066 Wrocław, Poland
autor
  • Institute of Experimental Physics, University of Wrocław, plac Maxa Borna 9, 50-204 Wrocław, Poland
autor
  • Institute of Experimental Physics, University of Wrocław, plac Maxa Borna 9, 50-204 Wrocław, Poland
autor
  • Institute of Experimental Physics, University of Wrocław, plac Maxa Borna 9, 50-204 Wrocław, Poland
Bibliografia
  • [1] HASHIMOTO K., IRIE H., FUJISHIMA A., TiO2 photocatalysis: a historical overview and future prospects, Japanese Journal of Applied Physics 44(12), 2005, pp. 8269–8285.
  • [2] FUJISHIMA A., XINTONG ZHANG, Titanium dioxide photocatalysis: present situation and future approaches, Comptes Rendus Chimie 9(5–6), 2006, pp. 750–760.
  • [3] ZHAOYUE LIU, XINTONG ZHANG, MURAKAMI T., FUJISHIMA A., Sol–gel SiO2/TiO2 bilayer films with self-cleaning and antireflection properties, Solar Energy Materials and Solar Cells 92(11), 2008, pp. 1434–1438.
  • [4] KACZMAREK D., PROCIÓW E.L., DOMARADZKI J., BORKOWSKA A., MIELCAREK W., WOJCIESZAK D., Influence of substrate type and its placement on structural properties of TiO2 thin films prepared by the high energy reactive magnetron sputtering method, Materials Science – Poland 26(1), 2008, pp. 113–117.
  • [5] RICHARDS B.S., COTTER J.E., HONSBERG C.B., WENHAM S.R., Novel uses of TiO2 in crystalline silicon solar cells, 28th IEEE PVSC, 2000, pp. 375–378.
  • [6] BAJT S., EDWARDS N.V., MADEY T.E., Properties of ultrathin films appropriate for optics capping layers exposed to high energy photon irradiation, Surface Science Reports 63(2), 2008, pp. 73–99.
  • [7] PROCIOW E.L., DOMARADZKI J., KACZMAREK D., WOJCIESZAK D., MORAWSKI A.W., JANUS M., Stabilization of TiO2-anatase in wide temperature range by europium doping, [In] Proceedings of ICTF 14 & RSD 2008, [Eds.] De Gryse R., Depla D., Poelman D., Mahieu S., Leroy W.P., Poelman H., 2008, pp. 349–352.
  • [8] DONGJIN BYUN, YONGKI JIN, BUMJOON KIM, JOONG KEE LEE, DALKEUN PARK, Photocatalytic TiO2 deposition by chemical vapor deposition, Journal of Hazardous Materials 73(2), 2000, pp. 199–206.
  • [9] CARLEY A.F., CHALKER P.R., RIVIERE J.C., WYN ROBERTS M., The identification and characterisation of mixed oxidation states at oxidised titanium surfaces by analysis of X-ray photoelectron spectra, Journal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases 83(2), 1987, pp. 351–370.
  • [10] MAYER J.T., DIEBOLD U., MADEY T.E., GARFUNKEL E., Titanium and reduced titania overlayers on titanium dioxide(110), Journal of Electron Spectroscopy and Related Phenomena 73(1), 1995, pp. 1–11.
  • [11] XIAO-PING WANG, YUN YU, XING-FANG HU, LIAN GAO, Hydrophilicity of TiO2 films prepared by liquid phase deposition, Thin Solid Films 371(1–2), 2000, pp. 148–152.
  • [12] MCCAFFERTY E., WIGHTMAN J.P., An X-ray photoelectron spectroscopy sputter profile study of the native air-formed oxide film on titanium, Applied Surface Science 143(1–4), 1999, pp. 92–100.
  • [13] DIEBOLD U., MADEY T.E., TiO2 by XPS, Surface Science Spectra 4(3), 1996, pp. 227–231.
  • [14] MADHU KUMAR P., BADRINARAYANAN S., MURALI SASTRY, Nanocrystalline TiO2 studied by optical, FTIR and X-ray photoelectron spectroscopy: correlation to presence of surface states, Thin Solid Films 358(1–2), 2000, pp. 122–130.
  • [15] DUPIN J.C., GONBEAU D., VINATIER P., LEVASSEUR A., Systematic XPS studies of metal oxides, hydroxides and peroxides, Physical Chemistry Chemical Physics 2(6), 2000, pp. 1319–1324.
  • [16] REN-DE SUN, NAKAJIMA A., FUJISHIMA A., WATANABE T., HASHIMOTO K., Photoinduced surface wettability conversion of ZnO and TiO2 thin films, Journal of Physical Chemistry B 105(10), 2001, pp. 1984–1990.
  • [17] MCCAFFERTY E., WIGHTMAN J.P., Determination of the concentration of surface hydroxyl groups on metal oxide films by a quantitative XPS method, Surface and Interface Analysis 26(8), 1998, pp. 549–564.
  • [18] BERTÓTI I., MOHAI M., SULLIVAN J.L., SAIED S.O., Surface characterisation of plasma-nitrided titanium: an XPS study, Applied Surface Science 84(4), 1995, pp. 357–371.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-844ef61e-ea46-4d5e-bc51-3dd09ef8e45d
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