Comparison of efficiency of electrostatic micro-actuators for precise positioning

• Autorzy: Štarman V. , Kacerovský J. , Jansa J. , Karban P. , Doležel I.
• Konferencja: Computer Applications in Electrical Engineering 2013 (15-16.04.2013; Poznań, Polska)
• Języki publikacji: EN

Abstrakty

EN

Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive higher-order finite element method, using a code developed by the authors. The methodology is illustrated by typical examples whose results are discussed.

Słowa kluczowe

EN

electrostatic micro-actuator; Laplace equation; higher-order finite element method

• Wydawca: Wydawnictwo Politechniki Poznańskiej
• Czasopismo: Poznan University of Technology Academic Journals. Electrical Engineering
• Rocznik: 2013
• Tom: No. 73
• Strony: 29--34
• Opis fizyczny: Bibliogr. 7 poz., rys.

Twórcy

autor

Štarman V.

• University of West Bohemia in Pilsen

autor

Kacerovský J.

• University of West Bohemia in Pilsen

autor

Jansa J.

• University of West Bohemia in Pilsen

autor

Karban P.

• University of West Bohemia in Pilsen

autor

Doležel I.

• University of West Bohemia in Pilsen

Bibliografia

• [1] X. Zhao, H. Dankowicz, Ch. K. Reddy, A. H. Nayfeh, “Modeling and simulation methodology for impact microactuators”, J. Micromech. Microeng 14, No 6, pp. 775-784, 2004.
• [2] R. Kondo, S. Takimoto, K. Suzuki, S. Sugiyama, “High aspect ratio electrostatic micro actuators using LIGA process”, Microsystem Technol. 6, No. 8, pp 218-221, 2000.
• [3] J. Muthuswamy, M. Okandan, T. Jain, A. Gilletti, “Electrostatic microactuators for precise positioning of neural microelectrodes”, IEEE Trans. Biomed. Eng. 52, No. 10, pp. 1748-1755, 2005.
• [4] P. Karban, F. Mach, P. Kus, D. Panek, I. Dolezel, “Numerical solution of coupled problems using code Agros2D”, Computing, DOI 10.1007/s00607-013-0294-4, ISSN 0010-485X.
• [5] P. Solin at al., http://hpfem.org/hermes
• [6] P. Solin, K. Segeth, I. Dolezel, Higher-Order Finite Element Methods, Chapman & Hall/CRC, Boca Raton, FL, USA, 2003.
• [7] P. Solin, J. Cerveny, I. Dolezel, “Arbitrary-level hanging nodes and automatic adaptivity in the hp-FEM”, Math. Comput. Simul. 77, No. 1, pp. 117-132, 2008.