The Effect of Titanium Nitride Thickness as a Support Layer for Carbon Nanotubes Growth

• Autorzy: Ramli Muhammad M. , Osman Nurul H. , Darminto D. , Abdullah Mohd Mustafa Al Bakri

Identyfikatory

DOI

10.24425/amm.2022.139689

• Języki publikacji: EN

Abstrakty

EN

The effect of titanium nitride (TiN) thickness as the support layer for carbon nanotubes (CNTs) growth was investigated by depositing three different thicknesses: 20 nm, 50 nm and 100 nm. This TiN support layer was deposited on SiO₂ pads before depositing nickel (Ni) as the catalyst material. The Ni distribution on different TiN thicknesses was studied under hydrogen environment at 600°C. Then, the samples were further annealed at 600°C in acetylene and hydrogen environment for CNTs growth. The results show that, the optimum TiN thickness was obtained for 50 nm attributed by the lowest D to G ratio (0.8).

Słowa kluczowe

EN

titanium nitride; support layer; carbon nanotubes; interconnection

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2022
• Tom: Vol. 67, iss. 3
• Strony: 963--966
• Opis fizyczny: Bibliogr. 18 poz., fot., tab., wykr.

Twórcy

autor

Ramli Muhammad M.

• Universiti Malaysia Perlis (UniMAP), Geopolymer & Green Technology, Centre of Excellence (CEGeoGTech), Perlis, Malaysia
• Universiti Malaysia Perlis (UniMAP), Faculty of Electronic Engineering Technology, Perlis, Malaysia

• https://orcid.org/0000-0001-5833-8037

autor

Osman Nurul H.

• Universiti Malaysia Perlis (UniMAP), Faculty of Electronic Engineering Technology, Perlis, Malaysia
• Universiti Putra Malaysia, Faculty of Science, Department of Physic, Applied Electromagnetic Laboratory, 43400 Serdang, Selangor, Malaysia

• https://orcid.org/0000-0003-4239-4258

autor

Darminto D.

• Institut Teknologi Sepuluh Nopember, Faculty of Science and Analytical Data, Department of Physic, Campus ITS Sukolilo-Surabaya 60111, Indonesia

• https://orcid.org/0000-0002-6269-9246

autor

Abdullah Mohd Mustafa Al Bakri

• Universiti Malaysia Perlis (UniMAP), Geopolymer & Green Technology, Centre of Excellence (CEGeoGTech), Perlis, Malaysia

• https://orcid.org/0000-0002-9779-8586

Bibliografia

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Uwagi

1. This work was supported by the Ministry of Education and Department of Physics, Faculty of Science, Universiti Putra Malaysia under Fundamental Research Grant Scheme (FRGS/1/2018/STG07/UPM/02/6). Authors would also like to thanks Madam Siti Salwa Mat Isa.

2. Opracowanie rekordu ze środków MNiSW, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2024).