MEMS accelerometer simulations in Matlab/SIMULINK and COMSOL Multiphysics

• Autorzy: Nazdrowicz J.
• Języki publikacji: EN

Abstrakty

EN

In this paper modelling and simulation of MEMS accelerometers in Matlab/SIMULINK environment are presented. Results of simulations of three different approaches: mathematical, electrical equivalent and physical models are compared with FEM accelerometer model created in COMSOL software. Results of simulations are analyzed for displacement response for two of the most popular spring geometries - folded and straight. Author takes into consideration crucial aspects of damping coefficients influence on accelerometer performance.

Słowa kluczowe

EN

microelectromechanical systems; simulation model; microaccelerometer; MATLAB; SIMULINK; MEMS modeling; SimScape toolbox

PL

mikroukład elektromechaniczny; model symulacyjny; mikroakcelerometr; MATLAB; SIMULINK; modelowanie MEMS; SimScape

• Wydawca: Lodz University of Technology. Department of Microelectronics and Computer Science
• Czasopismo: International Journal of Microelectronics and Computer Science
• Rocznik: 2017
• Tom: Vol. 8, nr 4
• Strony: 161--167
• Opis fizyczny: Bibliogr. 9 poz., il. (w tym kolor.), rys., wykr.

Twórcy

autor

Nazdrowicz J.

• Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland

Bibliografia

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