Characteristics of Carbide Interfacial Layer Formed During Deposition of DLC Films on 316L Stainless Steel Substrate

• Autorzy: Dudek M.

Identyfikatory

DOI

10.1515/amm-2017-0326

• Języki publikacji: EN

Abstrakty

EN

The paper presents the analysis of formation of interfacial layer during deposition of diamond like carbon film (DLC) on the 316L stainless steel by capacitive plasma discharge in the CH₄ atmosphere. The structure of the interfacial layer of DLC film was strongly affected by the temperature increase during the initial stages of the process. Initially, thin interfacial layer of 5 nm has been formed. As the temperature had reached 210°C, the second phase of the process was marked by the onset of carbon atoms diffusion into the steel and by the interface thickness increase. Finally, the growth of chromium carbide interface, the upward diffusion of chromium and nickel atoms to film, the etching and the decrease of the DLC film thickness were observed at 233°C. These investigations were carried out ex-situ by spectroscopic ellipsometry, X-ray diffraction, X-ray photoelectron spectroscopy and Raman spectroscopy.

Słowa kluczowe

EN

RF PECVD; carbon films; diamond like carbon film; film growth; carbides formation

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2017
• Tom: Vol. 62, iss. 4
• Strony: 2211--2216
• Opis fizyczny: Bibliogr. 28 poz., rys., tab., wykr.

Twórcy

autor

Dudek M.

• Lodz University of Technology, Institute of materials and Engineering, Stefanowskiego 1/15, 90-924 Lodz, Poland

Bibliografia

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Uwagi

EN

The author wishes to thank Prof. L. Martinu and Prof. J. Klemberg-Sapieha (École Polytechnique de Montréal) for opportunity to carry out of XRD, ellipsometry and hardness measurements, as well Dr M. Kozanecki (Lodz University of Technology) for Raman measurements and Dr M. Walock (University of Alabama at Birmingham) for XPS measurements.

PL

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).