Analysis of the Surface Microtexture of Sputtered Indium Tin Oxide Thin Films

• Autorzy: Ţălu Ştefan , Kulesza Sławomir , Bramowicz Miroslaw , Stępień Krzysztof , Dastan D.

Identyfikatory

DOI

10.24425/amm.2021.135877

• Języki publikacji: EN

Abstrakty

EN

The present research work involves the study of the 3-D surface microtexture of sputtered indium tin oxide (ITO) prepared on glass substrates by DC magnetron at room temperature. The samples were annealed at 450°C in air and were distributed into five groups, dependent on ambient combinations applied, as follows: I group, using argon (Ar); II group, using argon with oxygen (Ar+O₂); III group, using argon with oxygen and nitrogen (Ar+O₂+N₂); IV group, using argon with oxygen and hydrogen (Ar+O₂+H₂); and V group, using argon with oxygen, nitrogen, and hydrogen (Ar+O₂+N₂+H₂). The characterization of the ITO thin film surface microtexture was carried out by atomic force microscopy (AFM). The AFM images were stereometrically quantitatively analyzed to obtain statistical parameters, by ISO 25178-2: 2012 and ASME B46.1-2009. The results have shown that the 3-D surface microtexture parameters change in accordance with different fabrication ambient combinations.

Słowa kluczowe

EN

AFM; DC magnetron sputtering; ITO thin films; stereometric analysis; 3-D surface microtexture

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2021
• Tom: Vol. 66, iss. 2
• Strony: 443--450
• Opis fizyczny: Bibliogr. 39 poz., fot., rys., tab., wykr.

Twórcy

autor

Ţălu Ştefan

• Technical University of Cluj-Napoca, the Directorate of Research, Development and Innovation Management (DMCDI), Cluj- Napoca, 400020, Romania

• https://orcid.org/0000-0003-1311-7657

autor

Kulesza Sławomir

• University of Warmia and Mazury in Olsztyn, Faculty of Technical Sciences, 11 Oczapowskiego Str., 10-719 Olsztyn, Poland

• https://orcid.org/0000-0003-2889-5611

autor

Bramowicz Miroslaw

• University of Warmia and Mazury in Olsztyn, Faculty of Technical Sciences, 11 Oczapowskiego Str., 10-719 Olsztyn, Poland

• https://orcid.org/0000-0002-7716-544X

autor

Stępień Krzysztof

• Kielce University of Technology, Faculty of Mechatronics and Mechanical Engineering, Aleja 1000-lecia Państwa Polskiego 7, 25-314 Kielce, Poland

• https://orcid.org/0000-0002-4955-5344

autor

Dastan D.

• Georgia Institute of Technology, School of Materials Science and Engineering, Atlanta, Georgia 30332, USA

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Uwagi

1. The authors would like to thank to professor Joshua M. Pearce, and Adam Pringle (Department of Materials Science & Engineering, Michigan Technological University, Houghton, MI 49931-1295, USA), for providing AFM data.

2. Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2021).