Reliability in micro-manufacturing - case studies and optimization strategies

• Autorzy: Hartl C. , Chlynin A.

Warianty tytułu

DE

Zuverlässigkeit in der Produktion für die Mikrotechnik - fallstudien und Optimierungsstrategien

• Języki publikacji: EN

Abstrakty

EN

Micro-manufacturing methods are increasingly applied for the production of miniaturized components as well as of micro-sized geometrical features on conventionally sized products in economically and socially high relevant sectors. The individual techniques can be categorized into Micro-Electrochemical Systems (MEMS)-based process-es, and non-MEMS-based techniques. Traditional MEMS-based manufacturing is performed in volume production since many years. Non-MEMS manufacturing technologies, however, were predominantly developed during recent years by scaling down manufacturing processes for conventionally sized components. In particular, for the application of non-MEMS technologies in volume production, the miniaturization is associated with size-effects, which in many cases increase the scattering of process parameters and influence with this crucially production reliability. The paper provides a survey of cur-rently applied strategies to optimize reliability and process stability in production with an emphasis on non-MEMS technologies for micro-manufacturing.

DE

Die Produktion von Bauteilen und Strukturen für die Mikrotechnik gewinnt zunehmend an Bedeutung. Neben den seit Langem in der Serienfertigung eingesetzten und etablierten MEMS-basierten Technologien (MEMS: Micro-Electrochemical Systems), werden seit einigen Jahren in zunehmendem Maße Verfahren entwickelt, die auf einer Übertragung konventioneller Fertigungsverfahren vom Makro- auf den Mikro-Maßstab aufbauen. Schwierigkeiten treten hierbei durch sogenannte Skalierungseffekte auf, die sich durch vergleichsweise hohen Streuungen von Prozessparametern bemerkbar machen, die sich mit der technischen Zuverlässigkeit des Produktionssystems überlagern. Der vorliegende Beitrag gibt einen Überblick über den derzeitigen Stand der Technik im Umgang mit der Zuverlässigkeit und Prozessstabilität in der Fertigung für die Mikrotechnik mit skalierten Fertigungsverfahren.

Słowa kluczowe

EN

micro-manufacturing; reliability; maintenance; size effects

• Wydawca: Instytut Pojazdów Politechniki Warszawskiej
• Czasopismo: Zeszyty Naukowe Instytutu Pojazdów / Politechnika Warszawska
• Rocznik: 2017
• Tom: z. 3/112
• Strony: 83--92
• Opis fizyczny: Bibliogr. 50 poz., rys., wykr.

Twórcy

autor

Hartl C.

• Faculty of Automotive Systems Eng. and Production Eng., TH Köln

autor

Chlynin A.

• Faculty of Automotive Systems Eng. and Production Eng., TH Köln

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Uwagi

PL

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).