Analytical modeling of the harmonic distortion caused by squeeze film damping in MEMS-based acoustic transducers

• Autorzy: Melnikov Anton , Schenk Hermann A.G. , Wall Franziska

Identyfikatory

DOI

10.21008/j.0860-6897.2024.1.06

• Języki publikacji: EN

Abstrakty

EN

Miniaturized microelectromechanical system (MEMS) microspeakers are currently trending in the development of acoustic transducers. When a transducer is scaled down to fit on a microelectronic chip, its physics differ from the macroscopic world, and some common modeling assumptions become invalid. One of the effects observed in MEMS microspeakers is nonlinear squeeze film damping. Understanding this effect is crucial, as non-linearities in the speaker can result in perceptible harmonic distortions, which are undesirable in audio applications. In this study, we analyze the influence of squeeze film damping on harmonic distortions using a lumped parameter model of a MEMS microspeaker. This leads to a nonlinear ordinary differential equation, and an approximate analytical solution for moderate non-linearities is obtained using homotopy. We present our solution strategy, including the resulting closed-form expression, and verify our findings against numerical solutions.

Słowa kluczowe

EN

audio; loudspeaker; simulation; modelling; reduced order model; nonlinear system

PL

audio; głośnik; symulacja; modelowanie; modele zredukowanego rzędu; układ nieliniowy

• Wydawca: Poznan University of Technology. Institute of Applied Mechanics
• Czasopismo: Vibrations in Physical Systems
• Rocznik: 2024
• Tom: Vol. 35, nr 1
• Strony: art. no. 2024106
• Opis fizyczny: Bibliogr. 10 poz., il. kolor., 1 rys., wykr.

Twórcy

autor

Melnikov Anton

• Bosch Sensortec GmbH, Knappsdorfer Straße 12, 01099 Dresden, Germany

• https://orcid.org/0000-0001-9466-653X

autor

Schenk Hermann A.G.

• Bosch Sensortec GmbH, Knappsdorfer Straße 12, 01099 Dresden, Germany

autor

Wall Franziska

• Fraunhofer Institute for Photonic Microsystems IPMS, Maria-Reiche-Straße 2, 01109 Dresden, Germany

• https://orcid.org/0009-0003-6744-5717

Bibliografia

• 1. H. Wang, Y. Ma, Q. Zheng, K. Cao, Y. Lu, H. Xie; Review of Recent Development of MEMS Speakers; Micromachines, 2012, 12(10), 1257
• 2. B. Kaiser, S. Langa, L. Ehrig, M. Stolz, H. Schenk, H. Conrad, H. Schenk, K. Schimmanz, D. Schuffenhauer; Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers; Microsystems & Nanoengineering, 2019, 5(1), 1-11
• 3. J. M. Monsalve, et al.; Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion; Sensors and Actuators A: Physical, 2022, 345, 113813
• 4. A. Melnikov, H. A. G. Schenk, J. M. Monsalve, F. Wall, M. Stolz, A. Mrosk, S. Langa, B. Kaiser; Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation; Microsystems & Nanoengineering, 2021, 7(1), 41
• 5. J. M. Monsalve, A. Melnikov, B. Kaiser, D. Schuffenhauer, M. Stolz, L. Ehrig, H. Schenk, H. Conrad, H. Schenk; Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers; IEEE/ASME Transactions on Mechatronics, 2022, 27(5), 2612-2622
• 6. H. A. Schenk, A. Melnikov, F. Wall, M. Gaudet, M. Stolz, D. Schuffenhauer, B. Kaiser; Electrically Actuated Microbeams: An Explicit Calculation of the Coulomb Integral in the Entire Stable and Unstable Regimes Using a Chebyshev-Edgeworth Approach; Physical Review Applied, 2022, 18(1), 014059; DOI: 10.1103/PhysRevApplied.18.014059
• 7. M. Bao, H. Yang; Squeeze film air damping in MEMS; Sensors and Actuators A: Physical, 2027, 136 (1), 3-27
• 8. A. Melnikov, H. A. G. Schenk, F. Wall, B. Kaiser; Nonlinear damping effects in MEMS-based microspeakers; Proceedings of the 24th International Congress on Acoustics, ICA2022, Gyeongju, Korea, October 24-28, 2022
• 9. B. Kaiser, H. A. G. Schenk, L. Ehrig, F. Wall, J. M. Monsalve, S. Langa, M. Stolz, A. Melnikov, H. Conrad, D. Schuffenhauer, H. Schenk; The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers, Microsystems & Nanoengineering, 2022, 8(125); DOI: 10.1038/s41378-022-00458-z
• 10. D. Shmilovitz; On the definition of total harmonic distortion and its effect on measurement interpretation; IEEE Transactions on Power Delivery, 2005, 20(1), 526-528

Uwagi

Opracowanie rekordu ze środków MNiSW, umowa nr POPUL/SP/0154/2024/02 w ramach programu "Społeczna odpowiedzialność nauki II" - moduł: Popularyzacja nauki (2025).