Investigation of physicochemical and tribological properties of transparent oxide semiconducting thin films based on Ti-V oxides

• Autorzy: Mazur M. , Sieradzka K. , Kaczmarek D. , Domaradzki J. , Wojcieszak D. , Domanowski P.
• Języki publikacji: EN

Abstrakty

EN

In this paper investigations of structural and optical properties of nanocrystalline Ti–V oxide thin films are described. The films were deposited onto Corning 7059 glass using a modified reactive magnetron sputtering method. Structural investigations of prepared Ti–V oxides with vanadium addition of 19 at. % revealed amorphous structure, while incorporation of 21 and 23 at. % of vanadium resulted in V2O5 formation with crystallites sizes of 12.7 and 32.4 nm, respectively. All prepared thin films belong to transparent oxide semiconductors due to their high transmission level of ca. 60 – 75 % in the visible light range, and resistivity in the range of 3.3_10 ² – 1.4_10⁵ Wcm. Additionally, wettability and hardness tests were performed in order to evaluate the usefulness of the films for functional coatings.

Słowa kluczowe

EN

Ti–V oxide thin films; transparent oxide semiconductors; magnetron sputtering; tribological properties

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2013
• Tom: Vol. 31, No. 3
• Strony: 434--445
• Opis fizyczny: Bibliogr. 29 poz., rys., tab., wykr.

Twórcy

autor

Mazur M.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw

autor

Sieradzka K.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw

autor

Kaczmarek D.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw

autor

Domaradzki J.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw

autor

Wojcieszak D.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw

autor

Domanowski P.

• Faculty of Mechanical Engineering, University of Technology and Life Sciences in Bydgoszcz, Kaliskiego 7, 85-796 Bydgoszcz

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