Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

• Autorzy: Strzelecki G. W. , Nowakowska-Langier K. , Chodun R. , Okrasa S. , Wicher B. , Zdunek K.

Identyfikatory

DOI

10.2478/msp-2018-0078

• Języki publikacji: EN

Abstrakty

EN

The research on the influence of modulation frequency on the properties of films synthesized using a unique pulsed power supply combined with a standard unbalanced circular magnetron was conducted in the process of pulsed magnetron sputtering (PMS). It was shown that by using different levels of modulation, the composition of plasma (measured by optical emission spectroscopy, OES) as well as film growth rate and morphology (observed with scanning electron microscope, SEM), can be changed. The impact of modulation is related to the used materials and gases and can vary significantly. It was concluded that modulation frequency can greatly influence the synthesis of materials and can be used as an additional parameter in PMS. Specific relations between modulation frequency and synthesized material require further investigation.

Słowa kluczowe

EN

pulsed magnetron sputtering; pulse plasma; modulation frequency; metallic films; ceramic films

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2018
• Tom: Vol. 36, No. 4
• Strony: 697--703
• Opis fizyczny: Bibliogr. 12 poz., rys., tab.

Twórcy

autor

Strzelecki G. W.

• National Centre for Nuclear Research, Andrzeja Sołtana 7, 05-400 Otwock, Poland

autor

Nowakowska-Langier K.

• National Centre for Nuclear Research, Andrzeja Sołtana 7, 05-400 Otwock, Poland

autor

Chodun R.

• Faculty of Materials Science and Engineering, Warsaw University of Technology, Wołoska 141, 02-507 Warsaw, Poland

autor

Okrasa S.

• Faculty of Materials Science and Engineering, Warsaw University of Technology, Wołoska 141, 02-507 Warsaw, Poland

autor

Wicher B.

• Faculty of Materials Science and Engineering, Warsaw University of Technology, Wołoska 141, 02-507 Warsaw, Poland

autor

Zdunek K.

• Faculty of Materials Science and Engineering, Warsaw University of Technology, Wołoska 141, 02-507 Warsaw, Poland

Bibliografia

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• [10] NIST Atomic Spectra Database Lines, https://www.nist.gov/pml/atomic-spectra-database, accessed on: 2018.07.18.
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Uwagi

PL

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2019).