Analytical modeling of dual actuated compliant beam microgripper system

• Autorzy: Zaidi N. A. , Bazaz S. A.
• Języki publikacji: EN

Abstrakty

EN

This paper presents the analytical modeling for the design of a microgripper system that comprises dual jaw actuation mechanism with real-time contact sensing. The interdigitated lateral comb-drive based electrostatic actuator is used to move the gripper arms. Simultane- ous contact sensing is achieved through a transverse comb based capacitive sensor, to detect the contact between the jaws and microobject. The detailed analytical modeling of the mi- crogripper reveals that the stresses induced in the structure is well below the maximum yield stress of 7000MPa for single crystal silicon. The fabricated microgripper produced a displacement of 16 μm at gripper jaws for the applied actuation voltage of 45V, which is approximately the same as predicted by the analytical model.

Słowa kluczowe

EN

compliant structure; contact sensing; linear amplification; microgripper; micromanipulation

• Wydawca: Polskie Towarzystwo Mechaniki Teoretycznej i Stosowanej
• Czasopismo: Journal of Theoretical and Applied Mechanics
• Rocznik: 2014
• Tom: Vol. 52 nr 2
• Strony: 459--468
• Opis fizyczny: Bibliogr. 6 poz., rys.

Twórcy

autor

Zaidi N. A.

• Faculty of Electronic Engineering, Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Pakistan

autor

Bazaz S. A.

• Department of Computer Science, Centre for Advance Studies in Engineering (CASE), Islamabad, Pakistan

Bibliografia

• 1. Bao M., 2005, Analysis and Design Principles of MEMS Devices, 1st edition Elsevier
• 2. Beyeler F., Neild A., Oberti S., Bell D.J., Sun Y., Dual J., Nelson B.J., 2007, Mono-lithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field, Journal of Microelectromechanical Systems, 16, 1, 7-15
• 3. Miller K., Cowen A., Hames G., Hardy B., 2004, SOIMUMPs Design Handbook Version 4, Memscapinc, available at: http://www.memscap.com/products/mumps/soimumps/reference-material
• 4. Petersen K.E., 1982, Silicon as a mechanical material, Proceedings of the IEEE, 70, 5, 420-457
• 5. Universal Capactive Readout, 2004, Universal Capactive ReadoutTM IC (MS3110) Manual Irvine Sensor Coropration, available at: http://www.irvine sensors.com
• 6. Volland B.E., Heerlein H., Rangelow I.W., 2002, Electrostatically driven microgripper, Journal of Microelectronic Engineering, 61, 1015-1023