Characterization of the ionization process inside a miniature glow-discharge micropump

• Autorzy: Grzebyk T. , Górecka-Drzazga A.

Identyfikatory

DOI

10.24425/122097

• Języki publikacji: EN

Abstrakty

EN

The article presents a detailed characterization of the ionization process taking place inside a miniature MEMS-type ion-sorption vacuum pump, based on the Penning pump architecture. Influence of a variety of parameters on the discharge current has been investigated. These include: magnetic field, type of material used for the electrodes as well as horizontal and vertical dimensions of the micropump. It was found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and the pumping cell’s dimensions exceed 1x1x1 mm³. Best results have been obtained for copper and aluminum cathodes and low resistivity silicon anodes.

Słowa kluczowe

EN

ion-sorption micropump; MEMS-type micropump; gas discharge; ionization

PL

mikropompa jonowo-sorpcyjna; mikropompa typu MEMS; wyładowanie gazu; jonizacja

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2018
• Tom: Vol. 66, nr 2
• Strony: 173--178
• Opis fizyczny: Bibliogr. 18 poz., rys., wykr.

Twórcy

autor

Grzebyk T.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics 11/17 Janiszewskiego Str., 50-372 Wrocław, Poland

autor

Górecka-Drzazga A.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics 11/17 Janiszewskiego Str., 50-372 Wrocław, Poland

Bibliografia

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• [15] T. Grzebyk and A. Górecka-Drzazga, “Miniature ion-sorption vacuum pump with CNT field-emission electron source,” Journal of Micromechanics and Microengineering, vol. 23, 015007 (5pp) (2013).
• [16] T. Grzebyk, A. Górecka-Drzazga, J. Dziuban, A. Zawada, and P. Konarski, “Micropump for generation and control of vacuum inside miniature devices”, Journal of Microelectromechanical Systems, vol. 23 (1), 50‒55 (2014).
• [17] T. Grzebyk, A. Górecka-Drzazga, and J.A. Dziuban, “Glow-discharge ion-sorption micropump for vacuum MEMS”, Sensors & Actuators A, vol. 208, 113‒119 (2014).
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Uwagi

PL

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).