Effect of high electrostatic actuation on thermoelastic damping in thin rectangular microplate resonators

• Autorzy: Mohammadi A. K. , Ali N. A.

Identyfikatory

DOI

10.15632/jtam-pl.53.2.317

• Języki publikacji: EN

Abstrakty

EN

In this paper, a micro resonator is modeled as a thin rectangular microplate with thermoelastic damping that is actuated electrostatically. Large static deformation due to high polarization voltage is considered, and vibration of microplate occurs around the static de- flection. Due to the effect of thermoelastic damping, the frequency of vibration is a complex value that is used to determine the quality factor of thermoelastic damping. Also, the pull-in voltage is considered because nonlinear properties are more appeared when approaching the polarization voltage to the pull-in voltage.

Słowa kluczowe

EN

microplate resonator; thermoelastic damping; high polarization voltage

• Wydawca: Polskie Towarzystwo Mechaniki Teoretycznej i Stosowanej
• Czasopismo: Journal of Theoretical and Applied Mechanics
• Rocznik: 2015
• Tom: Vol. 53 nr 2
• Strony: 317--329
• Opis fizyczny: Bibliogr. 20 poz., rys., tab.

Twórcy

autor

Mohammadi A. K.

• Department of Mechanical Engineering, Shahrood University of Technology, Iran

autor

Ali N. A.

• Department of Mechanical Engineering, Shahrood University of Technology, Iran

Bibliografia

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