A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision

• Autorzy: Kucharski D. , Zdunek H.

Identyfikatory

DOI

10.24425/bpasts.2020.133364

• Języki publikacji: EN

Abstrakty

EN

We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ = 638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surfaces (Al mirrors with flatness λ/10) and seven equal steel plates to compare. The setup is easily adaptable for a fast, preliminary manufacturing quality control. We show is possible to construct a low-cost measurement system with nanometric precision.

Słowa kluczowe

EN

scatterometry; surface texture; optical measurement systems; surface metrology; surface roughness

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2020
• Tom: Vol. 68, nr 3
• Strony: 485--490
• Opis fizyczny: Bibliogr. 16 poz., rys., tab.

Twórcy

autor

Kucharski D.

• Division of Metrology and Measurement Systems, Institute of Mechanical Technology, Faculty of Mechanical Engineering, Poznan University of Technology, Jana Pawla II 24 Street, 60-965 Poznan

autor

Zdunek H.

• Division of Metrology and Measurement Systems, Institute of Mechanical Technology, Faculty of Mechanical Engineering, Poznan University of Technology, Jana Pawla II 24 Street, 60-965 Poznan

Bibliografia

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• [10] R. Leach, Y. Tzimiropoulos, N. Senin, M. Liu, and J. Coupland, “Revisiting optical scattering with machine learning (SPARKLE)”, Grant: EP/R028826/1. (2018‒2021). https://gow.epsrc.ukri.org/NGBOViewGrant.aspx? GrantRef=EP/R028826/1, (accessed November 8, 2019).
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Uwagi

PL

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).