Electron optics column for a new MEMS-type transmission electron microscope

• Autorzy: Krysztof M. , Grzebyk T. , Górecka-Drzazga A. , Adamski K. , Dziuban J.

Identyfikatory

DOI

10.24425/119067

• Języki publikacji: EN

Abstrakty

EN

The concept of a miniature transmission electron microscope (TEM) on chip is presented. This idea assumes manufacturing of a silicon-glass multilayer device that contains a miniature electron gun, an electron optics column integrated with a high vacuum micropump, and a sample microchamber with a detector. In this article the field emission cathode, utilizing carbon nanotubes (CNT), and an electron optics column with Einzel lens, made of silicon, are both presented. The elements are assembled with the use of a 3D printed polymer holder and tested in a vacuum chamber. Effective emission and focusing of the electron beam have been achieved. This is the first of many elements of the miniature MEMS (Micro-Electro-Mechanical System) transmission electron microscope that must be tested before the whole working system can be manufactured.

Słowa kluczowe

EN

MEMS; miniature TEM; electron emission; focusing of electron beam; electron optics column

PL

MEMS; emisja elektronów; ogniskowanie; wiązka elektronów; mikrostruktura TEM

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2018
• Tom: Vol. 66, nr 2
• Strony: 133--137
• Opis fizyczny: Bibliogr. 17 poz., rys., wykr.

Twórcy

autor

Krysztof M.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, 11/17 Janiszewskiego St., 50-372 Wrocław

autor

Grzebyk T.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, 11/17 Janiszewskiego St., 50-372 Wrocław

autor

Górecka-Drzazga A.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, 11/17 Janiszewskiego St., 50-372 Wrocław

autor

Adamski K.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, 11/17 Janiszewskiego St., 50-372 Wrocław

autor

Dziuban J.

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, 11/17 Janiszewskiego St., 50-372 Wrocław

Bibliografia

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• [13] Y. Shi, S. Ardanuc, and A. Lal, “Micro-einzel lens for wafer-integrated electron beam actuation”, MEMS 2013, Taipei, Taiwan, January 20‒24, 189‒192 (2013).
• [14] T-S. Oh, D-W. Kim, S. Ahn, Y.Ch. Kim, H-S. Kim, and S.J. Ahn, “Optimization of electrostatic lens systems for low-energy scanning microcolumn applications”, J. Vac. Sci. Technol. A, 26, 1443‒1449 (2008).
• [15] R.R.A. Syms, L. Michelutti, and M.M. Ahmad, “Two-dimensional microfabricated electrostatic einzel lens”, Sensor. Actuat. A, 107, 285‒295 (2003).
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Uwagi

PL

Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2018).