Analysis, evaluation, and optimization of bio-medical thermo-resistive micro-calorimetric flow sensor using an analytical approach

• Autorzy: Babaelahi Mojtaba , Sadri Somayyeh

Identyfikatory

DOI

10.24425/mms.2022.138545

• Języki publikacji: EN

Abstrakty

EN

Sensitive MEMS-based thermal flow sensors are the best choice for monitoring the patient’s respiration prompt diagnosis of breath disturbances. In this paper, open space micro-calorimetric flow sensors are investigated as precise monitoring tools. The differential energy balance equation, including convection and conduction terms, is derived for thermal analysis of the considered sensor. The temperature-dependent thermal conductivity of the thin silicon-oxide membrane layer is considered in the energy balance equation. The derived thermal non-linear differential equation is solved using a well-known analytical method, and a finite-element numerical solution is used for the confirmation. Results show that the presented analytical model offers a precise tool for evaluating these sensors. The effects of flow and thin membrane film parameters on thermo-resistive micro-calorimetric flow sensors’ performance and sensitivity are evaluated. The optimization has been performed at different flow velocities using a genetic algorithm method to determine the optimum configuration of the considered flow sensor. The geometrical parameters are selected as a decision variable in the optimization procedure. In the final step, using optimization results and curve-fitting, the expressions for the optimum decision variables have been derived. The sensor’s optimum configuration is achieved analytically based on flow velocity with the analytical terms for optimum decision variables.

Słowa kluczowe

EN

thermo-resistive; micro-calorimetric; sensor; temperature; variable conductivity; analytical solution; optimization

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2022
• Tom: Vol. 29, nr 1
• Strony: 109--125
• Opis fizyczny: Bibliogr. 28 poz., rys., tab., wykr., wzory

Twórcy

autor

Babaelahi Mojtaba

• Department of Mechanical Engineering, University of Qom, Qom, Iran

autor

Sadri Somayyeh

• Thermal Cycle and Heat Exchangers Department, Niroo Research Institute, Tehran, Iran

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).