Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

• Autorzy: Kaewon Rapeepan , Pawong Chutchai , Chitaree Ratchapak , Lertvanithphol Tossaporn , Bhatranand Apichai

Identyfikatory

DOI

10.37190/oa200106

• Języki publikacji: EN

Abstrakty

EN

An alternative polarization phase-shifting technique is proposed to determine the thickness of transparent thin-films. In this study, the cyclic interferometric configuration is chosen to maintain the stability of the operation against external vibrations. The incident light is simply split by a non-polarizing beam splitter cube to generate test and reference beams, which are subsequently polarized by a polarizing beam splitter. Both linearly polarized beams are orthogonal and counter-propagating within the interferometer. A wave plate is inserted into the common paths to introduce an intrinsic phase difference between the orthogonal polarized beams. A transparent thin-film sample, placed in one of the beam tracks, modifies the output signal in terms of the phase retardation in comparison with the reference beam. The proposed phase-shifting technique uses a moving mirror with a set of “fixed” polarizing elements, namely, a quarter-wave retarder and a polarizer, to facilitate phase extraction without rotating any polarizing devices. The measured thicknesses are compared with the measurements of the same films acquired using standard equipment such as the field-emission scanning electron microscope and spectroscopic ellipsometer. Experimental results with the corresponding measured values are in good agreement with commercial measurements. The system can be reliably utilized for non-destructive thickness measurements of transparent thin-films.

Słowa kluczowe

EN

polarization phase-shifting technique; cyclic interferometric configuration; non-destructive thickness measurements; transparent thin film

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2020
• Tom: Vol. 50, nr 1
• Strony: 69--81
• Opis fizyczny: Bibliogr. 25 poz., rys., tab.

Twórcy

autor

Kaewon Rapeepan

• Silpakorn University, Faculty of Engineering and Industrial Technology, Department of Electrical Engineering, 6 Rajamankha Nai Rd, Nakornpathom 73000, Thailand

autor

Pawong Chutchai

• Rajamangala University of Technology Krungthep, Faculty of Science and Technology, Physics Division, 2 Nanlinji Road, Bangkok 10120, Thailand

autor

Chitaree Ratchapak

• Mahidol University, Faculty of Science, Department of Physics, 272 Rama VI Road, Bangkok 10400, Thailand

autor

Lertvanithphol Tossaporn

• National Electronics and Computer Technology Center, Optical Thin-Film Laboratory, Pathumthani 12120, Thailand

autor

Bhatranand Apichai

• King Mongkut’s University of Technology Thonburi, Faculty of Engineering, Department of Electronic and Telecommunication Engineering, 126 Pracha U-thid Road, Bangkok 10140, Thailand

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).