ARMScope – the versatile platform for scanning probe microscopy systems

• Autorzy: Świadkowski Bartosz , Piasecki Tomasz , Rudek Maciej , Świątkowski Michał , Gajewski Krzysztof , Majstrzyk Wojciech , Babij Michał , Dzierka Andrzej , Gotszalk Teodor

Identyfikatory

DOI

10.24425/mms.2020.131711

• Języki publikacji: EN

Abstrakty

EN

Scanning probe microscopy (SPM) since its invention in the 80’s became very popular in examination of many different sample parameters, both in university and industry. This was the effect of bringing this technology closer to the operator. Although the ease of use opened a possibility for measurements without high labour requirement, a quantitative analysis is still a limitation in Scanning Probe Microscopes available on the market. Based on experience of Nano-metrology Group, SPM still can be considered as a tool for quantitative examination of thermal, electrical and mechanical surface parameters. In this work we present an ARMScope platform as a versatile SPM controller that is proved to be useful in a variety of applications: from atomic-resolution STM (Scanning Tunnelling Microscopy) to Multi-resonance KPFM (Kelvin Probe force microscopy) to commercial SEMs (Scanning electron microscopes).

Słowa kluczowe

EN

Scanning probe microscopy; AFM; Kelvin Probe force microscopy; scanning tunnelling microscopy

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2020
• Tom: Vol. 27, nr 1
• Strony: 119--130
• Opis fizyczny: Bibliogr. 19 poz., rys., tab., wykr., wzory

Twórcy

autor

Świadkowski Bartosz

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Piasecki Tomasz

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Rudek Maciej

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Świątkowski Michał

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Gajewski Krzysztof

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Majstrzyk Wojciech

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Babij Michał

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Dzierka Andrzej

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Gotszalk Teodor

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

Bibliografia

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• [4] Yacoot, A., Koenders, L. (2011). Recent developments in dimensional nanometrology using AFMs. Measurement Science and Technology, 22(12).
• [5] Danzebrink, H.U., Koenders, L., Wilkening, G., Yacoot, A., Kunzmann, H. (2006). Advances in scanning force microscopy for dimensional metrology. CIRP Annals - Manufacturing Technology, 55(2).
• [6] Hohlbauch, S.V. (2018). Video Rate Atomic Force Microscopy of Biological Samples. Biophys. J., 114.
• [7] Ahmad, A., Ivanov, T., Angelov, T., Rangelow, I. (2015). Fast atomic force microscopy with self-transduced, self-sensing cantilever. J. Micro/Nanolith. MEMS MOEMS, 14(3).
• [8] Ando, T. (2012). High-speed atomic force microscopy coming of age. Nanotechnology, 23(6).
• [9] Szyszka, A., Obłak, M., Szymański, T., Wośko, M., Dawidowski, W., Paszkiewicz, R. (2016). Scanning capacitance microscopy characterization of AIIIBV epitaxial layers. Mater. Sci. Pol., 34, 845-850.
• [10] Dufrêne, Y.F., Ando, T., Garcia, R., Alsteens, D., Martinez-Martin, D., Engel, A., Müller, D.J. (2017). Imaging modes of atomic force microscopy for application in molecular and cell biology. Nature Publishing Group, 12.
• [11] Alessandrini, A., Facci, P. (2005). AFM: A versatile tool in biophysics. Measurement Science and Technology, 16(6).
• [12] Janshoff, Neitzert, Oberdörfer, Fuchs (2000). Force Spectroscopy of Molecular Systems-Single Molecule Spectroscopy of Polymers and Biomolecules. Angewandte Chemie, 39(18), 3212-3237.
• [13] RHK product catalog: https://www.rhk-tech.com/r9plus/.
• [14] Oxford Instruments catalog: https://afm.oxinst.com/products/mfp-3d-afm-systems/.
• [15] Kopiec, D., Jóźwiak, G., Moczała, M., Sierakowski, A., Gotszalk, T. (2018). Multifrequency Kelvin probe force microscopy on self assembled molecular layers and quantitative assessment of images’ quality. Ultramicroscopy, 194, 100-107.
• [16] Biczysko, P., Dzierka, A., Jóźwiak, G., Rudek, M., Gotszalk, T., Janus, P., Grabiec, P., Rangelow, I.W. (2018). Contact atomic force microscopy using piezoresistive cantilevers in load force modulation mode. Ultramicroscopy, 184 (2018), 199-208.
• [17] Gajewski, K., Kunicki, P., Sierakowski, A., Szymański, W., Kaczorowski, W., Niedzielski, P., Gotszalk, T. (2019). High-resolution, spatially-resolved surface potential investigations of high-strength metallurgical graphene using scanning tunnelling potentiometry. Microelectronic Engineering, 212, 1-8.
• [18] Świadkowski, B., Majstrzyk, W., et al. (2019). Near zero contact force atomic microscopy investigations using active electromagnetic cantilevers. submitted to Ultramicroscopy.
• [19] Kopiec, D., Jóźwiak, G., Moczała, M., Sierakowski, A., Gotszalk, T. (2018). Multifrequency Kelvin probe microscopy on self assembled molecular layers and quantitative assessment of images’ quality. Reprinted from Ultramicroscopy, 194, 100-107.

Uwagi

EN

1. The authors would like to express their gratitude to all the students and PhD students who have supported the development of the described setup over the past years for their work on ARMScope AFM prototype, especially to Michał Zielony, Maciej Słociński and Dr Grzegorz Jóźwiak. The development of the PID controller, HV electronics and Scan field controller was carried out within the National Science Center (NCN) Preludium 11 Grant (Grant No. 2016/21/N/ST7/02275). The STM examinations were supported by the Wroclaw University of Science and Technology (WrUST) statutory grant.

PL

2. Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).