Effect of NF3 Gas on Stabilization of Alkaline Earth Metal-Cu Mordenite Catalysts During N2O Decomposition Reaction

• Autorzy: Seo Minhye , Lee Soo-Young , Cho Sung-Su , Song Hyoung Woon , Kim Hyun-Kyung , Kim Dong Soo , Lee Sungkyu

Identyfikatory

DOI

0.24425/amm.2019.127600

• Języki publikacji: EN

Abstrakty

EN

Mordenite-zeolite supported Ca-Cu and Ba-Cu catalysts (Ca-Cu/MOR and Ba-Cu MOR) were successfully fabricated for direct decomposition of both NF₃ and N₂O gases contained in waste gas stream of (semiconductor) electronics industry. N₂O conversion rates of Ca-Cu and Ba-Cu catalysts were 79 and 86%, respectively, at 700°C and 1 atm under space velocity of 5000 h^-1. The Ca-Cu catalyst was especially noteworthy in that its capability of converting N₂O could be maintained even after its exposure to co-feeding NF₃ gas constituent in the waste gas stream. Compositional and surface morphological analyses of the Ca-Cu and Ba-Cu catalysts were made before and after exposure to the waste gas stream to examine any noticeable degradation or change of the catalysts. Unlike Ba-Cu catalyst, SiO₂ constituent of the Ca-Cu catalyst was found to remain immune to the NF₃-cofeeding waste gas stream, casting a positive prospect for superior and steady N₂O decomposition performance via maintenance of its structural integrity.

Słowa kluczowe

EN

nitrous oxide; N2O; nitrofluorine three; NF3; perfluorocompounds; PFCs; direct decomposition

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2019
• Tom: Vol. 64, iss. 2
• Strony: 695--700
• Opis fizyczny: Bibliogr. 18 poz., fot., rys., tab., wzory

Twórcy

autor

Seo Minhye

• Plant Engineering Division, Institute for Advanced Engineering, Goan-ro 51 Beon-gil 175-28, Baegam-myeon, Cheoin-gu, Yongin-si, Gyeonggi-do, 17180, South Korea

autor

Lee Soo-Young

• Plant Engineering Division, Institute for Advanced Engineering, Goan-ro 51 Beon-gil 175-28, Baegam-myeon, Cheoin-gu, Yongin-si, Gyeonggi-do, 17180, South Korea

autor

Cho Sung-Su

• Plant Engineering Division, Institute for Advanced Engineering, Goan-ro 51 Beon-gil 175-28, Baegam-myeon, Cheoin-gu, Yongin-si, Gyeonggi-do, 17180, South Korea

autor

Song Hyoung Woon

• Plant Engineering Division, Institute for Advanced Engineering, Goan-ro 51 Beon-gil 175-28, Baegam-myeon, Cheoin-gu, Yongin-si, Gyeonggi-do, 17180, South Korea

autor

Kim Hyun-Kyung

• Mat Plus Co. Ltd., 31-22 Mansudong-gil, Gongdo-eup, Anseong-si, Gyeonggi-do, 17549, South Korea

autor

Kim Dong Soo

• Mat Plus Co. Ltd., 31-22 Mansudong-gil, Gongdo-eup, Anseong-si, Gyeonggi-do, 17549, South Korea

autor

Lee Sungkyu

• Plant Engineering Division, Institute for Advanced Engineering, Goan-ro 51 Beon-gil 175-28, Baegam-myeon, Cheoin-gu, Yongin-si, Gyeonggi-do, 17180, South Korea

Bibliografia

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Uwagi

EN

1. This study was supported by the R & D Center for Reduction of Non-CO2 Greenhouse Gases (2017002420001) funded by Korea Ministry of the Environment (MOE) as Global Top Environment R & D Program.

PL

2. Opracowanie rekordu w ramach umowy 509/P-DUN/2018 ze środków MNiSW przeznaczonych na działalność upowszechniającą naukę (2019).