Electrical schematics for 1D analysis of a bridge type MEMS capacitive switch

• Autorzy: Kula S. , Lup A. -S.
• Języki publikacji: EN

Abstrakty

EN

In this paper, a robust method to analyse a simple model of a RF (Radio Frequency) MEMS (Micro Electro-Mechanical Systems) capacitive switch is depicted. The method is based on multi-physics phenomenons and interdependencies between different physics domains. A component, which enables to link variety of the physics domains is an electrical equivalent circuit. Such equivalent circuit has been created in LTSpice software, which is a freeware circuits simulator. This electrical equivalent schematic enables to run static, frequency domain, transient analysis. The presented method enables simultaneous simulations in an electrical, mechanical and electro-mechanical domain. Obtained results were verified by the comparison with the results of a commercial software, a scientific software and data from literature. The method, presented in the paper gives robust, accurate results in the one-dimensional analysis domain of simple mechanical resonators, which are simplified mechanical models of the RF MEMS capacitive switches.

Słowa kluczowe

EN

RF MEMS capacitive switch; electrical equivalent schematic; multi-physics simulations

• Wydawca: Wydawnictwo Politechniki Poznańskiej
• Czasopismo: Computer Applications in Electrical Engineering
• Rocznik: 2014
• Tom: Vol. 12
• Strony: 407--421
• Opis fizyczny: Bibliogr. 11 poz., rys., tab.

Twórcy

autor

Kula S.

• Kazimierz Wielki Uniyersity in Bydgoszcz 85-074 Bydgoszcz, ul. Kopernika 1

autor

Lup A. -S.

• Politechnica University of Bucharest zip 06 0042 Bucharest, Splaiul Independentei 313

Bibliografia

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• [2] Hsu T.R., MEMS and Microsystems: Design and Manufacture. McGraw-Hill Publisher, Boston, USA, 2002.
• [3] G.M. Rebeiz, RF MEMS: Theory, Design, and Technology. John Wiley & Sons Publisher, 2003.
• [4] Helvajian H., Microengineering Aerospace Systems. AIAA Publisher, Edition I, El Segundo, California, 1999.
• [5] Kula S., 1-D equivalent circuit for RF MEMS capacitive switch. Poznan University of Technology Academic Journals, Series Electrical Engineering, Iss. 80, ISSN 1897-0737, 2014.
• [6] Kraus G., SPICE-Simulation using LTspice IV. Elektronikschule Tettnang, Germany, 2010.
• [7] Veijola T., Nonlinear Circuit Simulation of MEMS Components: Controlled Current Source Approach. ECCTD ’01, Espoo, Finland, 2001.
• [8] Muldavin J.B., Rebeiz G.M., Nonlinear electro-mechanical modeling of MEMS switches. Microwave Symposium Digest, IEEE MTT-S International, Volume 3, ISSN 0149-645X , 2001.
• [9] Konishi T., Machida K., Masu K., and Toshiyoshi H., Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators. ECS Trans., Volume 50, ISSN 1945-7111, 2013.
• [10] Ciuprina G., Lup S., Dițǎ B., Ioan D., Sorohan S., Isvoranu D. and Kula S., Mixed-domain Macro-Models for RF MEMS Capacitive Switches. Scientific Computing in Electrical Engineering SCEE 2014, Wuppertal, Germany, 2014.
• [11] Ai Qun Liu. RF MEMS Switches, and Integrated Switching, Circuits, Design, Fabrication, and Test. MEMS Reference Shelf, ISBN: 978-0-387-46261-5, Springer New York Dordrecht Heidelberg London, 2010.