Two-step etch in n-on-p type-II superlattices for surface leakage reduction in mid-wave infrared megapixel detectors

• Autorzy: Ramos David , Delmas Marie , Ivanov Ruslan , Žurauskaitė Laura , Evans Dean , Almqvist Susanne , Becanovic Smilja , Hellström Per-Erik , Costard Eric , Höglund Linda

Identyfikatory

DOI

10.24425/opelre.2023.144556

• Konferencja: Quantum Structure Infrared Photodetectors - QSIP : International Conference 2020/2022 (11 ; 2022 ; Kraków, Poland)
• Języki publikacji: EN

Abstrakty

EN

This work investigates the potential of p-type InAs/GaSb superlattice for the fabrication of full mid-wave megapixel detectors with n-on-p polarity. A significantly higher surface leakage is observed in deep-etched n-on-p photodiodes compared to p-on-n diodes. Shallowetch and two-etch-step pixel geometry are demonstrated to mitigate the surface leakage on devices down to 10 μm with n-on-p polarity. A lateral diffusion length of 16 μm is extracted from the shallow etched pixels, which indicates that cross talk could be a major problem in small pitch arrays. Therefore, the two-etch-step process is used in the fabrication of 1280 × 1024 arrays with a 7.5 μm pitch, and a potential operating temperature up to 100 K is demonstrated.

Słowa kluczowe

EN

infrared detector; surface leakage; type-II superlattice; megapixel; n-on-p

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2023
• Tom: Vol. 31, Special Issue
• Strony: art. no. e144556
• Opis fizyczny: Bibliogr. 28 poz., rys., wykr.

Twórcy

autor

Ramos David

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden
• School of Electrical Engineering and Computer Science KTH Royal Institute of Technology, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Delmas Marie

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Ivanov Ruslan

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Žurauskaitė Laura

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Evans Dean

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Almqvist Susanne

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Becanovic Smilja

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Hellström Per-Erik

• School of Electrical Engineering and Computer Science KTH Royal Institute of Technology, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Costard Eric

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

autor

Höglund Linda

• IRnova AB, Isafjordsgatan 22, Kista 164 40, Sweden

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).