Multi-technique characterisation of InAs-on-GaAs wafers with circular defect pattern

• Autorzy: Boguski Jacek , Wróbel Jarosław , Złotnik Sebastian , Budner Bogusław , Liszewska Malwina , Kubiszyn Łukasz , Michałowski Paweł P. , Ciura Łukasz , Moszczyński Paweł , Odrzywolski Sebastian , Jankiewicz Bartłomiej , Wróbel Jerzy

Identyfikatory

DOI

10.24425/opelre.2023.144564

• Konferencja: Quantum Structure Infrared Photodetectors - QSIP : International Conference 2020/2022 (11 ; 2022 ; Kraków, Poland)
• Języki publikacji: EN

Abstrakty

EN

The article presents the results of diameter mapping for circular-symmetric disturbance of homogeneity of epitaxially grown InAs (100) layers on GaAs substrates. The set of acceptors (beryllium) doped InAs epilayers was studied in order to evaluate the impact of Be doping on the 2-inch InAs-on-GaAs wafers quality. During the initial identification of size and shape of the circular pattern, non-destructive optical techniques were used, showing a 100% difference in average roughness between the wafer centre and its outer part. On the other hand, no volumetric (bulk) differences are detectable using Raman spectroscopy and highresolution X-ray diffraction. The correlation between Be doping level and circular defect pattern surface area has been found.

Słowa kluczowe

EN

wafer homogeneity; wafer defect pattern; surface roughness; indium arsenide; beryllium doping

• Wydawca: Stowarzyszenie Elektryków Polskich ; Polska Akademia Nauk ; Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego
• Czasopismo: Opto-Electronics Review
• Rocznik: 2023
• Tom: Vol. 31, Special Issue
• Strony: art. no. e144564
• Opis fizyczny: Bibliogr. 62 poz., rys., tab., wykr.

Twórcy

autor

Boguski Jacek

• Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

• https://orcid.org/0000-0001-8643-4894

autor

Wróbel Jarosław

• Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

• https://orcid.org/0000-0002-6385-3399

autor

Złotnik Sebastian

• Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

• https://orcid.org/0000-0003-3891-5209

autor

Budner Bogusław

• Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

autor

Liszewska Malwina

• Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

autor

Kubiszyn Łukasz

• VIGO Photonics S.A., Poznańska 129/133, 05-850 Ożarów Mazowiecki, Poland

autor

Michałowski Paweł P.

• Łukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warsaw, Poland

autor

Ciura Łukasz

• Department of Electronics Fundamentals, Rzeszów University of Technology, W. Pola 12, 35-959 Rzeszów, Poland

autor

Moszczyński Paweł

• Institute of Computer and Information Systems, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

• https://orcid.org/0000-0001-9034-0698

autor

Odrzywolski Sebastian

• Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

autor

Jankiewicz Bartłomiej

• Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland

autor

Wróbel Jerzy

• Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland
• Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland

• https://orcid.org/0000-0003-1762-9131

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Uwagi

1. Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).

2. This work has been completed with the financial support under the program of the Ministry of Education and Science (MEiN): “Regional Initiative of Excellence” in 2019-2022; project no. 014/RID/2018/19. funding amount of 4 589 200.00 PLN. The authors would also like to thank Professor Józef Piotrowski from VIGO Photonics S.A. for the fruitful discussion.