Preparation and microstructural characterization of Si(100) Ce1−x Gd x O2−δ thin films prepared by pulsed laser deposition technique

Nagaraju, P; Vijayakumar, Y; Phase, D M; Reddy, V R

doi:10.2478/s13536-014-0246-5

Artykuł - szczegóły

Tytuł artykułu

Preparation and microstructural characterization of Si(100) Ce1−x Gd x O2−δ thin films prepared by pulsed laser deposition technique

Autorzy

Nagaraju P , Vijayakumar Y , Phase D M , Reddy V R

Wybrane pełne teksty z tego czasopisma

Identyfikatory

DOI

10.2478/s13536-014-0246-5

Warianty tytułu

Języki publikacji

Abstrakty

Microstructural properties of Ce1−xGdxO2−δ (x = 0 to 0.3) thin films prepared by pulsed laser deposition technique were studied. The thin films were deposited on Si(100) substrate at a substrate temperature of 973 K at the oxygen partial pressure of 0.2 Pa using KrF excimer laser with energy of 220 mJ. The prepared thin films were characterized by X-ray diffraction, Raman spectroscopy and atomic force microscopy. X-ray diffraction analysis confirmed the polycrystalline nature of the thin films. Crystallite size, strain and dislocation density were calculated. The Raman studies revealed the formation of Ce–O with the systematic variation of peak intensity and full width half maxima depending on concentration of gadolinium dopant. The thickness of the films was estimated using Talystep profiler. The surface roughness was estiamted based on AFM.

Słowa kluczowe

cerium oxide dislocation densities gadolinium doped cerium oxide microstructure pulsed laser deposition thin films

Wydawca

De Gruyter

Czasopismo

Materials Science Poland

Rocznik

2014

Tom

Vol. 32, No. 4

Strony

541--546

Opis fizyczny

Bibliogr. 30 poz., rys., wykr., tab.

Twórcy

autor

Nagaraju P

nagarajuphysics@gmail.com

CMR Technical Campus, Hyderabad, India

autor

Vijayakumar Y

Department of Physics, Osmania University, Hyderabad, India

autor

Phase D M

IUC, Indore, India

autor

Reddy V R

IUC, Indore, India

Bibliografia

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Typ dokumentu

Bibliografia

Identyfikator YADDA

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