Enhancement of Life Time of the Dimensionally Stable Anode for Copper Electroplating Applications

• Autorzy: Son S. H. , Park S. C. , Lee M. S.

Identyfikatory

DOI

10.1515/amm-2017-0145

• Języki publikacji: EN

Abstrakty

EN

In order to enhance the long-term stability of DSA for copper electroplating process, in the present study, noble metal oxides with excellent electrochemical properties was used and optimum condition was determined the ratio of noble metal oxides, surface pre-treatment of titanium substrate and heat treatment. The effect of the surface pretreatment of titanium substrate and ratio of noble metal oxides were estimated by accelerated test at the highly current density conditions. The lifetime of DSA increase six-fold higher as the oxide thickness of Ta 7 : Ir 3 composition ratio. Under the optimal condition, surface pretreatment led to dramatic increase in the lifetime of DSA.

Słowa kluczowe

EN

dimensionally stable anode; surface treatment; life time; copper; electrodeposition

• Wydawca: Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences
• Czasopismo: Archives of Metallurgy and Materials
• Rocznik: 2017
• Tom: Vol. 62, iss. 2B
• Strony: 1019--1022
• Opis fizyczny: Bibliogr. 8 poz., rys., tab.

Twórcy

autor

Son S. H.

• Surface Treatment R&D Group, Korea Institute of Industrial Technology, Incheon, Korea

autor

Park S. C.

• Surface Treatment R&D Group, Korea Institute of Industrial Technology, Incheon, Korea

autor

Lee M. S.

• Department of Advanced Material Science and Engineering, Mokpo National University, Chonnam, Korea

Bibliografia

• [1] A.N.S. Rao, V.T. Venkatarangaiah, Environ. Sci. Pollut. Res. 21, 3197 (2014).
• [2] Z. Yan, Y. Zhao, Z. Zhang, G. Li, H. Li, J. Wang, Z. Feng, M. Tang, X. Yuan, R. Zhang, Y. Du, Electrochimica Acta. 157, 345 (2015).
• [3] P. Bagri, Evaluation of coated titanium anode. Master thesis, University of Utah, Utah, UT 84112, August (2012).
• [4] J.Y. Lee, D.K. Kang, K.H. Lee, D.Y. Chang, Mater. Sci. Appl. 2, 237 (2011).
• [5] S.Y. Kwak, H.G. Kim, J.M. Byun, J.H. Park, M.-J. Suk, S.-T. Oh, Y.D. Kim, J. Kor. J. Kor. Powd. Met. Inst. 21, 28 (2014).
• [6] J.M. Hu, H.M. Meng, J.Q. Zhang, C.N. Cao, Corr. Sci. 44, 1655 (2002).
• [7] F. Fathollahi, M. Javanbakht, M.R. Ganjali, P. Nourozi, Anal. Bioanal. Electrochem, 5, 689 (2013).
• [8] S.C. Park, Y.B. Park, J. Electron. Mater. 37, 1565 (2008).

Uwagi

PL

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę (zadania 2017)