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Performance analysis of serpentine springs compliant to out-of-plane oscillation

Treść / Zawartość
Identyfikatory
Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
The performance of two serpentine type springs is comparatively investigated. The first type is composed of straight beams and the second one is composed of circular arcs. Based on comparing calculation results and simulation data, the crab-leg spring model is appropriate for evaluating the stiffness of springs. To obtain the operation mode to be the first mode, the number of turns and the opening angle of springs should be increased. The performance of springs is evaluated via analysis of mode coupling. This study is useful for choosing an appropriate serpentine spring and the stiffness calculation model for applications in microelectroemchanical sensors and actuators.
Rocznik
Strony
91--101
Opis fizyczny
Bibliogr. 17 poz., rys.
Twórcy
  • International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Vietnam
  • FTP University, Hanoi, Vietnam
  • International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Vietnam
  • FTP University, Hanoi, Vietnam
  • International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi, Vietnam
Bibliografia
  • 1. Barillaro G., Molfese A., Nannini A., Pieri F., 2005, Analysis simulation and relative performances of two kinds of serpentine springs, Journal of Micromechanics and Microengineering, 15, 4, 736-746.
  • 2. Chou H.M., Lin M.J., Chen R., 2016, Investigation of mechanics properties of an awl-shaped serpentine microspring for in-plane displacement with low spring constant-to-layout area, Journal of Micro/Nanolithography, MEMS, and MOEMS, 15, 3.
  • 3. Gu L., Li X., Bao H., Liu B., Wang Y., Liu M., Yang Z., Cheng B., 2006, Single wafer-processed nanopositioning XY-stages with trench-sidewall micromachining technology, Journal of Micromechanics and Microengineering, 16, 7, 1349-1357.
  • 4. Hieu D.V., Tam L.V., Duong N.V., Vy N.D., Hoang C.M., 2020, Design and simulation analysis of a z axis microactuator with low mode cross-talk, Journal of Mechanics, 36, 881-888.
  • 5. Hieu D.V., Tam L.V., Hane K., Hoang C.M., 2020, Design and simulation analysis of an integrated XYZ micro-stage for controlling displacement of scanning probe, Journal of Theoretical and Applied Mechanics, 59, 143-156.
  • 6. Hongwen L., 2004, Mechanics of materials, Higher Education Press, 201010, 5, 87-119.
  • 7. Huang Y.J., Chang T.L., Chou H.P., 2009, Novel concept design for complementary metal oxide semiconductor capacitive Z-direction accelerometer, Japanese Journal of Applied Physics, 48, 7.
  • 8. Legtenberg R., Groeneveld A.W., Elwenspoek M., 1996, Comb-drive actuators for large displacements, Journal of Micromechanics and Microengineering, 6, 3, 320-329.
  • 9. Liu X., Kim K., Sun Y., 2007, A MEMS stage for 3-axis nanopositioning, Journal of Micromechanics and Microengineering, 17, 9, 1796-1802.
  • 10. Lobontiu N., Garcia E., 2005, Mechanics of Microelectromechanical Systems, Kluwer Academic Publishers, 167-178.
  • 11. Matsumoto Y., Nishimura M., Matsuura M., Ishida M., 1999, Three-axis SOI capacitive accelerometer with PLL C-V converter, Sensors and Actuators A: Physical, 75, 1, 77-85.
  • 12. Nguyen M., Ha N., Nguyen L., Chu H., Vu H., 2017, Z-axis micromachined tuning fork gyroscope with low air damping, Micromachines, 8, 2, 42.
  • 13. Peroulis D., Pacheco S.P., Sarabandi K., Katehi L.P.B., 2003, Electromechanical considerations in developing low-voltage RF MEMS switches, IEEE Transactions on Microwave Theory and Techniques, 51, 259-270.
  • 14. Rouabah H.A., Gollasch C.O., Kraft M., 2005, Design optimisation of an electrostatic MEMS actuator with low spring constant for an “atom chip”, NSTI-Nanotech, 3, 489-492.
  • 15. Sharaf A., Sedky S., 2012, Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer, Microsystem Technologies, 19, 8, 1153-1163.
  • 16. Su G.-D.J., Hung S.H., Jia D., Jiang F., 2005, Serpentine spring corner designs for micro-electro-mechanical systems optical switches with large mirror mass, Optical Review, 12, 4, 339-344.
  • 17. Weinberg M., Kourepenis A., 2006, Error sources in in-plane silicon tuning-fork MEMS gyroscopes, Journal of Microelectromechanical Systems, 15, 3, 479-491.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-4b769c44-23cf-4ad0-9b6a-c27a97bfd639
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