Novel GIMS technique for deposition of colored Ti/TiO2 coatings on industrial scale

• Autorzy: Zdunek K. , Skowronski L. , Chodun R. , Nowakowska-Langier K. , Grabowski A. , Wachowiak W. , Okrasa S. , Wachowiak A. , Strauss O. , Wronkowski A. , Domanowski P.

Identyfikatory

DOI

10.1515/msp-2016-0024

• Języki publikacji: EN

Abstrakty

EN

The aim of the present paper has been to verify the effectiveness and usefulness of a novel deposition process named GIMS (Gas Injection Magnetron Sputtering) used for the first time for deposition of Ti/TiO₂ coatings on large area glass substrates covered in the condition of industrial scale production. The Ti/TiO₂ coatings were deposited in an industrial system utilizing a set of linear magnetrons with the length of 2400 mm each for covering the 2000 x 3000 mm glasses. Taking into account the specific course of the GIMS (multipoint gas injection along the magnetron length) and the scale of the industrial facility, the optical coating uniformity was the most important goal to check. The experiments on Ti/TiO₂ coatings deposited by the use of GIMS were conducted on substrates in the form of glass plates located at the key points along the magnetrons and intentionally non-heated during any stage of the process. Measurements of the coatings properties showed that the thickness and optical uniformity of the 150 nm thick coatings deposited by GIMS in the industrial facility (the thickness differences on the large plates with 2000 mm width did not exceed 20 nm) is fully acceptable form the point of view of expected applications e.g. for architectural glazing.

Słowa kluczowe

EN

GIMS; Gas Injection Magnetron Sputtering; Plasma Surface Engineering; Impulse Plasma Deposition

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2016
• Tom: Vol. 34, No. 1
• Strony: 137--141
• Opis fizyczny: Bibliogr. 23 poz., rys.

Twórcy

autor

Zdunek K.

• Faculty of Materials Science, Warsaw University of Technology, Warsaw, 02-507 Poland

autor

Skowronski L.

• Institute of Mathematics and Physics UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

autor

Chodun R.

• Faculty of Materials Science, Warsaw University of Technology, Warsaw, 02-507 Poland

autor

Nowakowska-Langier K.

• National Centre for Nuclear Research, 05-400 Otwock-Swierk, Poland

autor

Grabowski A.

• Institute of Mathematics and Physics UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

autor

Wachowiak W.

• Institute of Mathematics and Physics UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

autor

Okrasa S.

• Faculty of Materials Science, Warsaw University of Technology, Warsaw, 02-507 Poland

autor

Wachowiak A.

• Institute of Mathematics and Physics UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

autor

Strauss O.

• Institute of Mathematics and Physics UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

autor

Wronkowski A.

• Institute of Mathematics and Physics UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

autor

Domanowski P.

• Faculty of Mechanical Engineering UTP University of Science and Technology, Bydgoszcz, 85-789 Poland

Bibliografia

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Uwagi

Opracowanie ze środków MNiSW w ramach umowy 812/P-DUN/2016 na działalność upowszechniającą naukę.