Preparation of ITO films using a spray pyrolysis solution containing an acetylacetone chelating agent

• Autorzy: Gao Y. , Zhao G. , Duan Z. , Ren Y.

Identyfikatory

DOI

10.2478/s13536-013-0159-8

• Języki publikacji: EN

Abstrakty

EN

Indium tin oxide (ITO) films were deposited on soda-lime glass substrates by the spray pyrolysis method using a spray solution of InCl33H2O as a precursor, SnCl45H2O as a dopant and acetylacetone (AcAcH) as a chelating agent. The effect of the addition of AcAcH to the spray solution on the surface morphology of the ITO film was investigated. The surface quality of the film prepared from the spray solution with AcAcH was better than that without AcAcH. The ITO film with the thickness of 230 nm, using the spray solution with AcAcH, exhibited the lowest resistivity of 4.75 × 10􀀀4 Wcm and higher optical transmittance of 85 %, respectively.

Słowa kluczowe

EN

spray pyrolysis; ITO; acetylacetone; chelate

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2014
• Tom: Vol. 32, No. 1
• Strony: 66--70
• Opis fizyczny: Bibliogr. 13 poz., rys., tab., wykr.

Twórcy

autor

Gao Y.

• School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, 710048, China

autor

Zhao G.

• School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, 710048, China

autor

Duan Z.

• School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, 710048, China

autor

Ren Y.

• School of Materials Science and Engineering, Xi’an University of Technology, Xi’an, 710048, China

Bibliografia

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