An Efficient MEMS Sensor Modelling by Geometrical Parameter Optimization

• Autorzy: Kulkarni Vaishali Sanjay , Chorage Suvarna Sandip

Identyfikatory

DOI

10.24425/ijet.2022.139880

• Języki publikacji: EN

Abstrakty

EN

Numerous technological applications use MEMS capacitive sensing technique as a major component, because of their ease of fabrication process, inexpensive and high sensitivity. The paper aims at modeling interdigitated capacitive (IDC) sensing. Virtually observe the contribution of variations in geometrical parameters to sensor efficiency and optimization factor. The sensor design is verified through ANSYS simulations. Results indicate “an efficient but poorly optimized sensor is better than a well-optimized sensor”. It is difficult to detect capacitance in the range of few pF generated using capacitive sensing. How it can be maximized with dimension optimization is focused in this paper.

Słowa kluczowe

EN

virtual IDE modelling; MEMS; sensor optimization; ANSYS modeling and applications

• Wydawca: Polish Academy of Sciences, Committee of Electronics and Telecommunication
• Czasopismo: International Journal of Electronics and Telecommunications
• Rocznik: 2022
• Tom: Vol. 68, No. 2
• Strony: 287--291
• Opis fizyczny: Bibliogr. 21 poz., rys., tab.

Twórcy

autor

Kulkarni Vaishali Sanjay

• Department of E&TC at AISSMSIOIT-Pune, India

autor

Chorage Suvarna Sandip

• Department of E&TC at BVCOEW-Pune, India

Bibliografia

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Uwagi

Opracowanie rekordu ze środków MEiN, umowa nr SONP/SP/546092/2022 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2022-2023).