Sensors on the Basis of PorSi for MEMS

• Autorzy: Lobur M. , Kosobutskyy P. , Naperalski A. , Monastyrski L.
• Języki publikacji: EN

Abstrakty

EN

We propose to use technology of electrochemical formation of low-dimensional porous silicon(porSi), which is compatible with the standard technologies of silicon VLSI, for creation of sensor part of MEMS "Lab-on-chip" type.

Słowa kluczowe

EN

porous silicon; PS; MEMS; heterostructures; sensors

• Wydawca: Oficyna Wydawnicza Politechniki Warszawskiej
• Czasopismo: Machine Dynamics Research
• Rocznik: 2013
• Tom: Vol. 37, No. 2
• Strony: 60--64
• Opis fizyczny: Bibliogr. 7 poz., wykr.

Twórcy

autor

Lobur M.

• National University Lviv Polytechnic, Department of Computer-Aided Design Systems, Ukraine

autor

Kosobutskyy P.

• National University Lviv Polytechnic, Department of Computer-Aided Design Systems, Ukraine

autor

Naperalski A.

• Lodz University of Technology, Department of Microelectronics and Computer Science, Poland

autor

Monastyrski L.

• Ivan Franco National University of Lviv, Department of Electronics, Ukraine

Bibliografia

• 1. M.V. Lobur, V. Teslyuk, A. Sydor, 2012, Modeling Parameters of Reliability for Composite Embedded Systems, VIII-th International Conference MEMSTECH’2012 “Perspective Technologies and Methods in MEMS Design”, 18-21 April 2012, Polyana-Svalyava, Ukraine, pp. 24-26.
• 2. L.S. Monastyrski, V.P. Savchyn, V.I. Kytsay, P.V. Parandii, 1999, Photovoltaic detectors based on porous silicon heterostructures, Chemia, 1999, pp. 352-356.
• 3. L.S. Monastyrski, B.S. Sokolovski, V.S. Vasylyshyn, 2009, Calculation of photosensivity of porous silicon with the cylindrical geometry of pores, Optical Memory & Neural Networks, 2009, pp. 55-59.
• 4. L.S. Monastyrski, I.B. Olenych, P.V. Parandii, 2000, Luminescence of porous silicon and porous silicon encapsulated structures, Optica Applicata, 2000, pp. 641-646.
• 5. L.S. Monastyrski, V.M. Tsmots, O.I. Aksimentieva, M.R. Pavlyk, 2010, Peculiarities of field dependences of magnetic susceptibility of low dimensional porous silicon, Polish-Ukr.Seminar on Phys.Chem.Solid, 2010, pp. 115.
• 6. L.S. Monastyrski, P.V. Parandii, R.I. Yaremyk, 2010, Gas matrix sensors on the porous silicon base, III-International Conference on Physical methods in environmental, biology and medicine, 9-12 September 2010, Lviv - Shack, 2010, pp. 95-98.
• 7. L.S. Monastyrski, 2013, Relaxation of photoconductivity in porous silicon for gas sensing, Conference 8718: Advanced Environmental, Chemical and Biological Sensing Technologies X, 2013, pp. 153-154.