Hydrogen sensor based on field effect transistor with C–Pd layer

• Autorzy: Firek Piotr , Krawczyk Sławomir , Wronka Halina , Czerwosz Elżbieta , Szmidt Jan

Identyfikatory

DOI

10.24425/mms.2020.132777

• Języki publikacji: EN

Abstrakty

EN

ISFET (Ion Sensitive Field Effect Transistors) microsensors are widely used for pH measurements as well as analytical and biomedical applications. At the same time, ISFET is a good candidate for testing various materials for their applications in sensitive membranes. For example, hydrogen sensitive carbonaceous films containing Pd nanocrystallites (C-Pd) make this material very interesting for sensor applications. A cost effective silicon technology was selected to fabricate n-channel transistors. The structures were coupled to specially designed double-sided PCB (Printed Circuit Board) holder. The holder enables assembly of the structure as part of an automatic stand. The last step of production of MIS structures was deposition of the C-Pd layer. The C-Pd films were fabricated by the Physical Vapor Deposition (PVD) method in which C60 and palladium acetate were evaporated. Electrical resistance of structures with C-Pd films was measured during their interaction with hydrogen. Finally, a new type of highly sensitive FET hydrogen sensor with C-Pd layer was demonstrated and characterized.

Słowa kluczowe

EN

FET; C-Pd layer; hydrogen sensor; field effect transistor

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2020
• Tom: Vol. 27, nr 2
• Strony: 313--321
• Opis fizyczny: Bibliogr. 26 poz., rys., wykr.

Twórcy

autor

Firek Piotr

• Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland

autor

Krawczyk Sławomir

• Łukasiewicz Research Network Tele- & Radio Research Institute, Ratuszowa 11, 03-450 Warsaw, Poland

autor

Wronka Halina

• Łukasiewicz Research Network Tele- & Radio Research Institute, Ratuszowa 11, 03-450 Warsaw, Poland

autor

Czerwosz Elżbieta

• Łukasiewicz Research Network Tele- & Radio Research Institute, Ratuszowa 11, 03-450 Warsaw, Poland

autor

Szmidt Jan

• Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warsaw, Poland

Bibliografia

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Uwagi

EN

1. This work was supported by the statutory work funding.

PL

2. Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).