Construction Of A Piezoelectric-Based Resonance Ceramic Pressure Sensor Designed For High-Temperature Applications

• Autorzy: Belavič D. , Bradeško A. , Santo Zarnik M. , Rojac T.

Identyfikatory

DOI

10.1515/mms-2015-0034

• Języki publikacji: EN

Abstrakty

EN

In this work the design aspects of a piezoelectric-based resonance ceramic pressure sensor made using low-temperature co-fired ceramic (LTCC) technology and designed for high-temperature applications is presented. The basic pressure-sensor structure consists of a circular, edge-clamped, deformable diaphragm that is bonded to a ring, which is part of the rigid ceramic structure. The resonance pressure sensor has an additional element – a piezoelectric actuator – for stimulating oscillation of the diaphragm in the resonance-frequency mode. The natural resonance frequency is dependent on the diaphragm construction (i.e., its materials and geometry) and on the actuator. This resonance frequency then changes due to the static deflection of the diaphragm caused by the applied pressure. The frequency shift is used as the output signal of the piezoelectric resonance pressure sensor and makes it possible to measure the static pressure. The characteristics of the pressure sensor also depend on the temperature, i.e., the temperature affects both the ceramic structure (its material and geometry) and the properties of the actuator. This work is focused on the ceramic structure, while the actuator will be investigated later.

Słowa kluczowe

EN

LTCC; piezoelectric; pressure sensor

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2015
• Tom: Vol. 22, nr 3
• Strony: 331--340
• Opis fizyczny: Bibliogr. 12 poz., rys., tab., wykr.

Twórcy

autor

Belavič D.

• HIPOT-RR, Šentpeter 18, SI-8222 Otočec, Slovenia
• Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
• Centre of Excellence NAMASTE, Jamova 39, SI-1000 Ljubljana, Slovenia

autor

Bradeško A.

• Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
• Jožef Stefan International Postgraduate School, Jamova 39, SI-1000 Ljubljana, Slovenia

autor

Santo Zarnik M.

• HIPOT-RR, Šentpeter 18, SI-8222 Otočec, Slovenia
• Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia

autor

Rojac T.

• Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
• Jožef Stefan International Postgraduate School, Jamova 39, SI-1000 Ljubljana, Slovenia

Bibliografia

• [1] Partsch, U., Arndt, D., Georgi, H. (2007). A new concept for LTCC-based pressure sensors. Proc. of 3rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT 2007, Denver, Colorado, USA, 367-372, CD-ROM.
• [2] Belavič, D., Hrovat, M., Pavlin, M., Santo Zarnik, M. (2003). Thick-film technology for Sensor Applications.Informacije MIDEM, 33(1), 45-50.
• [3] Maeder, T., Jacq, C., Briol, H., Ryser, P. (2003). High-strength Ceramic Substrates for Thick-film Sensor Applications. Proc. of 14th European Microelectronics and Packaging Conference EMPC 2003, Frieddrichshafen, Germany, 133-140, CD-ROM.
• [4] Belavič, D., Hrovat, M., Holc, J., Santo Zarnik, M., Kosec, M., Pavlin, M. (2007). The application of thick-film technology in C-MEMS. Journal Electroceramics, 19, 363-368.
• [5] Belavič, D., Santo Zarnik, M., Hrovat, M., Maček, S., Pavlin, M., Jerlah, M., Holc, J., Drnovšek, S., Cilenšek, J., Kosec, M. (2007). Benchmarking different types of thick-film pressure sensors. Proc. of 3rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT 2007, Denver, Colorado, USA, 278-285, CD-ROM.
• [6] Belavič, D. (2008). Piezoresistive, piezoelectric and capacitive pressure sensors. Tutorial: Ceramic pressure sensors - from materials to devices. Proc. of 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT 2008, Munich, Germany, CDROM.
• [7] Santo Zarnik, M., Belavič, D., Maček, S., Holc, J. (2009) Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure. International journal of applied ceramic technology, 6(1), 9-17.
• [8] Golonka, L.J., Malecha, K. (2012). LTCC Fluidic Microsystems. Informacije MIDEM, 42(4), 225-233.
• [9] Kita, J., Moos, R. (2003). Development of LTCC-materials and Their Applications: an Overview. Informacije MIDEM, 38(4), 219-224.
• [10] Belavič, D., Hrovat, M., Santo Zarnik, M., Makarovič, K, Benčan, A., Holc, J., Dolanc, G., Fajdiga, P., Hočevar, S., Pohar, A., Kovač, F., Hodnik, M., Konda, A., Jordan, B., Sedlakova, V., Sikula, J., Malič, B. (2014). An overview of LTCC based ceramic microsystems: from simple pressure sensors to complex chemical reactors. Proc. of EDS’ 14, Electronic Devices and Systems IMAPS CS International Conference 2014, Brno, Czech Republic, XVI-XXI, CD-ROM.
• [11] Santo Zarnik, M., Belavič, D., Sedlakova, V., Sikula, J., Majzner, J., Sedlak, P. (2012). Estimation of the long-term stability of piezoresistive LTCC pressure sensors by means of low-frequency noise measurements. Sensors and actuators A Physical, 199, 334-343.
• [12] Lide, R.D. (2005). Handbook of chemistry and Physics. Boca Raton, CRC Press.

Uwagi

EN

The financial support of the Slovenian Research Agency as part of the research project J2-5483, and the research program P2-0105 are gratefully acknowledged. A part of this work was financially supported by the company KEKO Equipment.