Analytical Thermo-electric Model of Uncooled Microbolometer

• Autorzy: Zając P. , Maj C. , Szermer M. , Lobur M. , Napieralski A.
• Języki publikacji: EN

Abstrakty

EN

Modelling of Microelectromechanical systems (MEMS) is a field of active research. An analytical model of a MEMS device allows significantly reducing the design time because simulating such a model is much faster than Finite Element Method (FEM) simulation. The main idea presented in this paper is the analytical thermo-electric model of uncooled microbolometer. It is shown that the model gives accurate results for a wide range of geometric parameters and material properties.

Słowa kluczowe

EN

MEMS; microbolometer; FEM simulation; modelling

• Wydawca: Oficyna Wydawnicza Politechniki Warszawskiej
• Czasopismo: Machine Dynamics Research
• Rocznik: 2013
• Tom: Vol. 37, No. 3
• Strony: 99--105
• Opis fizyczny: Bibliogr. 4 poz., rys., wykr.

Twórcy

autor

Zając P.

• Lodz University of Technology

autor

Maj C.

• Lodz University of Technology

autor

Szermer M.

• Lodz University of Technology

autor

Lobur M.

• Lviv Polytechnic National University

autor

Napieralski A.

• Lodz University of Technology

Bibliografia

• 1. Chen C., Yi X., Zhang J., Zhao X., “Linear uncooled microbolometer array based on VOx thin films”, Infrared Physics Technology, Vol. 42, Issue 2, Pages 87-90, April 2001.
• 2. Moreno M., Torres A., Ambrosio R. and Kosareev A. “Cooled Microbolometers with Amorphous Germanium-Silicon (a-GexSiy:H) Thermo-Sensing Films”, Bolometers, Prof. Unil Perera (Ed.), ISBN: 978-953-51-0235-9, InTech, 2012.
• 3. Saxena R.S., Bhan R.K., Jalwania C.R., Rana P.S., Lomash S.K., “Characterization of area arrays of microbolometer-based un-cooled IR detectors without using ROIC”, Sensors and Actuators A: Physical, Volume 141, Issue 2, pp. 359–366, 15 February 2008.
• 4. Zając P., Szermer M., Maj C., Zabierowski W., Melnyk M., Matviykiv O., Napieralski A., Lobur M. “Electrothermal FEM Simulation of Uncooled Titanium-based Microbolometer”, IX-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH), Polyana, UKRAINE, 1 - 2 April 2013.