Electroacoustic Analysis of a Controlled Damping Planar CMOS-MEMS Electrodynamic Microphone

• Autorzy: Tounsi F. , Mezghani B. , Rufer L. , Masmoudi M.

Identyfikatory

DOI

10.1515/aoa-2015-0052

• Języki publikacji: EN

Abstrakty

EN

This paper gives a detailed electroacoustic study of a new generation of monolithic CMOS micromachined electrodynamic microphone, made with standard CMOS technology. The monolithic integration of the mechanical sensor with the electronics using a standard CMOS process is respected in the design, which presents the advantage of being inexpensive while having satisfactory performance. The MEMS microphone structure consists mainly of two planar inductors which occupy separate regions on substrate. One inductor is fixed; the other can exercise out-off plane movement. Firstly, we detail the process flow, which is used to fabricate our monolithic microphone. Subsequently, using the analogy between the three different physical domains, a detailed electro-mechanical-acoustic analogical analysis has been performed in order to model both frequency response and sensitivity of the microphone. Finally, we show that the theoretical microphone sensitivity is maximal for a constant vertical position of the diaphragm relative to the substrate, which means the distance between the outer and the inner inductor. The pressure sensitivity, which is found to be of the order of a few tens of μV/Pa, is flat within a bandwidth from 50 Hz to 5 kHz.

Słowa kluczowe

EN

MEMS sensor; acoustical model; monolithic electroacoustic microphone; suspended diaphragm; lumped element modeling

• Wydawca: Instytut Podstawowych Problemów Techniki PAN ; Komitet Akustyki PAN ; Polskie Towarzystwo Akustyczne
• Czasopismo: Archives of Acoustics
• Rocznik: 2015
• Tom: Vol. 40, No. 4
• Strony: 527--537
• Opis fizyczny: Bibliogr. 25 poz., rys., tab., wykr.

Twórcy

autor

Tounsi F.

• EMC Research Group, National Engineering School of Sfax, University of Sfax, Route Soukra, BP 1173, 3038 Sfax, Tunisia

autor

Mezghani B.

• EMC Research Group, National Engineering School of Sfax, University of Sfax, Route Soukra, BP 1173, 3038 Sfax, Tunisia

autor

Rufer L.

• TIMA Laboratory, University Grenoble Alpes, 46, Avenue Félix Viallet, 38031 Grenoble, France

autor

Masmoudi M.

• EMC Research Group, National Engineering School of Sfax, University of Sfax, Route Soukra, BP 1173, 3038 Sfax, Tunisia

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