Comparative study on various microbolometer structures

• Autorzy: Nazdrowicz J. , Szermer M. , Maj C. , Zabierowski W. , Napieralski A.
• Języki publikacji: EN

Abstrakty

EN

Meaningful progress in the fields of MEMS is associated with the continuous development of the micromachining technologies. One of the most promising devices in MEMS is thermal sensors. When the first microbolometer appeared on the market, a huge interest in thermal detectors was observed. This paper is a short overview study on microbolometer geometry, different solutions and possibilities to implement them as electrical models.

Słowa kluczowe

EN

microbolometer; MEMS; microsystems; thermal imaging; integrated circuits

PL

mikrobolometr; MEMS; mikrosystemy; obrazowanie termiczne; układy scalone

• Wydawca: Lodz University of Technology. Department of Microelectronics and Computer Science
• Czasopismo: International Journal of Microelectronics and Computer Science
• Rocznik: 2016
• Tom: Vol. 7, nr 1
• Strony: 16--25
• Opis fizyczny: Bibliogr. 36 poz., il. kolor., rys., wykr.

Twórcy

autor

Nazdrowicz J.

• Department of Microelectronics and Computer Science, Lodz University of Technology, ul. Wólczańska 221/223, 90-924 Lodz, Poland

autor

Szermer M.

• Department of Microelectronics and Computer Science, Lodz University of Technology, ul. Wólczańska 221/223, 90-924 Lodz, Poland

autor

Maj C.

• Department of Microelectronics and Computer Science, Lodz University of Technology, ul. Wólczańska 221/223, 90-924 Lodz, Poland

autor

Zabierowski W.

• Department of Microelectronics and Computer Science, Lodz University of Technology, ul. Wólczańska 221/223, 90-924 Lodz, Poland

autor

Napieralski A.

• Department of Microelectronics and Computer Science, Lodz University of Technology, ul. Wólczańska 221/223, 90-924 Lodz, Poland

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