Technological challenges in manufacturing of vacuum gauge thermionic cathode using thick-film technology

• Autorzy: Jasińska Laura , Dzbik Krzysztof , Nowak Damian , Stojek Krzysztof , Chudzyńska Aleksandra , Politański Kamil , Malecha Karol

Identyfikatory

DOI

10.2478/msp-2024-0007

• Języki publikacji: EN

Abstrakty

EN

This paper focuses on the development of a technological challenges of manufacturing the planar ceramic vacuum sensor based on the principles of hot-cathode ionization in the Bayard-Alpert configuration. The goal is to simplify the technological process by utilizing planar platinum structures with gold electrical paths instead of 3-dimensional structures. Various methods were tested, including the use of carbon-based SVM (Sacrifice Volume Materials) materials, but without success. Wet-etching using potassium hydroxide on Al2O3 substrates showed promise results. The findings highlight the challenges and progress made in developing the thermo-emittercomponent of the vacuum sensor.

Słowa kluczowe

EN

alundum; wet etching; vacuum gauge; SVM; thick-film

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2024
• Tom: Vol. 42, No. 1
• Strony: 126--139
• Opis fizyczny: Bibliogr. 38 poz., rys., tab

Twórcy

autor

Jasińska Laura

• Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems Wrocław, Poland

autor

Dzbik Krzysztof

• Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems Wrocław, Poland

autor

Nowak Damian

• Wrocław University of Science and Technology, Faculty of Electronics, Photonics and MicrosystemsWrocław, Poland

autor

Stojek Krzysztof

• Wrocław University of Science and Technology, Faculty of Electronics, Photonics and MicrosystemsWrocław, Poland

autor

Chudzyńska Aleksandra

• Nanores Sp. z o. o. Sp. k. Wrocław, Poland

autor

Politański Kamil

• Nanores Sp. z o. o. Sp. k. Wrocław, Poland

autor

Malecha Karol

• Wrocław University of Science and Technology, Faculty of Electronics, Photonics and MicrosystemsWrocław, Poland

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