A method of magnetic field measurement in a scanning electron microscope using a microcantilever magnetometer

• Autorzy: Orłowska Karolina , Mognaschi Maria E. , Kwoka Krzysztof , Piasecki Tomasz , Kunicki Piotr , Sierakowski Andrzej , Majstrzyk Wojciech , Podgórni Arkadiusz , Pruchnik Bartosz , di Barba Paolo , Gotszalk Teodor

Identyfikatory

DOI

10.24425/mms.2020.131710

• Języki publikacji: EN

Abstrakty

EN

Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1] and movement measurement [2, 3] both in high and environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures. In our view, the magnetic field expanding from the pole-piece makes it possible to characterize the behaviour of electromagnetic micro- and nano-electromechanical systems (MEMS/NEMS) in which the deflection of the movable part is controlled by the electromagnetic force. What must be determined, however, is the magnetic field expanding from the e-beam column, which is a function of many factors, like working distance (WD), magnification and position of the device in relation to the e-beam column. There are only a few experimental methods for determination of the magnetic field in a scanning electron microscope. In this paper we present a method of the magnetic field determination under the scanning electron column by application of a silicon cantilever magnetometer. The micro-cantilever magnetometer is a silicon micro-fabricated MEMS electromagnetic device integrating a current loop of lithographically defined dimensions. Its stiffness can be calibrated with a precision of 5% by the method described by Majstrzyk et al. [4]. The deflection of the magnetometer cantilever is measured with a scanning electron microscope and thus, through knowing the bias current, it is possible to determine the magnetic field generated by the e-beam column in a defined position and at a defined magnification.

Słowa kluczowe

EN

scanning electron microscope; magnetometry; microcantilever

• Wydawca: Komitet Metrologii i Aparatury Naukowej PAN
• Czasopismo: Metrology and Measurement Systems
• Rocznik: 2020
• Tom: Vol. 27, nr 1
• Strony: 141--149
• Opis fizyczny: Bibliogr. 25 poz., rys., wykr.

Twórcy

autor

Orłowska Karolina

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Mognaschi Maria E.

• University of Pavia, Department of Electrical, Computer and Biomedical Engineering, Via Ferrata 5, 27100 Pavia, Italy

autor

Kwoka Krzysztof

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Piasecki Tomasz

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Kunicki Piotr

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Sierakowski Andrzej

• Łukasiewicz Research Network – Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland

autor

Majstrzyk Wojciech

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

Podgórni Arkadiusz

• Central Office of Measures, Elektoralna 2, 00-139 Warsaw, Poland

autor

Pruchnik Bartosz

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

autor

di Barba Paolo

• University of Pavia, Department of Electrical, Computer and Biomedical Engineering, Via Ferrata 5, 27100 Pavia, Italy

autor

Gotszalk Teodor

• Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11-17, 50-372 Wrocław, Poland

Bibliografia

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Uwagi

EN

1. The examinations presented here were financed by the National Science Centre (NCN) Preludium Grant “Mechanical impedance measurements of MEMS structures with the use of the photon force reference, PF-MEMS” (Grant No. 2017/25/N/ST7/02780) and Etiuda Grant “Metrologia oddziaływań optomechanicznych z układami mikroelektromechanicznymi MEMS” (Grant No. 2018/28/T/ST7/00302).

PL

2. Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).