Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique

• Autorzy: Wang Zhaoyong , Jiang Weifen , Lu Yifan , Wang Xinlian , Huang Xiaoya , Yao Ning

Identyfikatory

DOI

10.2478/msp-2019-0082

• Języki publikacji: EN

Abstrakty

EN

TiO₂ thin films were deposited by the energy filtrating magnetron sputtering (EFMS) technique and the traditional direct current magnetron sputtering (DMS) technique. The influence of the filtering electrode mesh number on the structure and optical properties of TiO₂ thin films was investigated. The structure, surface morphology and optical properties were characterized by XRD, SEM and ellipsometric spectroscopy, respectively. Results show that the TiO₂ thin films deposited by the DMS and EFMS techniques at the same deposition parameters are composed of the anatase phase exclusively. TiO₂ thin films deposited at lower deposition rate by the EFMS technique have lower crystallinity, smaller particle size and smoother surface. With increasing the mesh number, the refractive index, extinction coefficient and optical band gap are larger.

Słowa kluczowe

EN

energy filtering magnetron sputtering; titanium oxide thin film; optical property

• Wydawca: De Gruyter
• Czasopismo: Materials Science Poland
• Rocznik: 2020
• Tom: Vol. 38, No. 1
• Strony: 1--7
• Opis fizyczny: Bibliogr. 28 poz., tab., rys.

Twórcy

autor

Wang Zhaoyong

• School of Mathematics and Physics, Henan Urban Construction University, Pingdingshan 467036, China

autor

Jiang Weifen

• Departments of Mathematics and Information Science, North China University of Water Resources and Electric Power Zhengzhou 450045, China

autor

Lu Yifan

• School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China

autor

Wang Xinlian

• School of Mathematics and Physics, Henan Urban Construction University, Pingdingshan 467036, China

autor

Huang Xiaoya

• School of Mathematics and Physics, Henan Urban Construction University, Pingdingshan 467036, China

autor

Yao Ning

• School of Physical Engineering and Laboratory of Material Physics, Zhengzhou University, Zhengzhou 450052, China

Bibliografia

• [1] FUJISHIMA A., HONDA K., Nature, 238 (1972), 37.
• [2] LEE Y., HO W., YEH C., Appl. Surf. Sci., 354 Part A (2015), 20.
• [3] YURDDASKAL M., DIKICI T., YILDIRIM S., J. Alloy. Compd., 651 (2015), 59.
• [4] MA H., AN R., CHEN L., Electrochem. Commun., 57 (2015), 18.
• [5] DU W., YE Y., LI H., Vacuum, 86 (2012), 1387.
• [6] MARIN R.P., ISHIKAWA S., BAHRUJI H., Appl. Catal. A, 504 (2015), 62.
• [7] LI X.Y., XIAO J.R., WANG Z.Y., Mater. Sci. Eng. B, 177 (2012), 869.
• [8] ZHANG M., LIU L., YANG X., Surf. Coat. Technol., 229 (2013), 186.
• [9] SHANG Z.G., LIU Z.Q., SHANG P.J., J. Mater. Sci. Technol., 28 (2012), 385.
• [10] WANG Z.Y., YAO N., HU XING, Mater. Sci. Semicond. Process., 21 (2014), 91.
• [11] ZHANG X., LI D., WAN J., Mater. Sci. Semicond. Process., 43 (2016), 47.
• [12] YAHAYA M.Z., ABDULLAH M.Z, MOHAMAD A.A., J. Alloy. Compd., 651 (2015), 557.
• [13] SCHEFFEL B., MODES T., METZNER C., Surf. Coat. Technol., 287 (2016), 138
• [14] SIRGHI L., HATANAKA Y., SAKAGUCHI K., Appl. Surf. Sci., 352 (2015), 38.
• [15] HOTSENPILLER P.A.M., WILSON G.A., ROSHKO A., J. Cryst. Growth, 166 (1996), 779.
• [16] ALBERTINETTI N., MINDEN H.T., Appl. Opt., 35 (1996), 5620.
• [17] GIBSON D., CHILD D., SONG S., Thin Solid Films, 592 (2015), 276.
• [18] ZHANG X., COOKE K., CARMICHAEL P., Surf. Coat. Technol., 236 (2013), 290.
• [19] ZHAOYONG W., NING Y., CHANGBAO H., Appl. Surf. Sci., 288 (2014), 604.
• [20] YONG Z., W., XING H., NING Y., J. Electron. Mater., 44 (2015), 979.
• [21] WANG Z.Y., YAO N., HU X., Vacuum, 108 (2014), 20.
• [22] HOSHI Y., SUZUKI E., SHIMIZU H., Electrochim. Acta, 44 (1999) 3945.
• [23] MATTOX D.M., J. Vac. Sci. Technol. A, 7 (1989) 1106.
• [24] KIM D.J., HAHN S.H., OH S.H., Mater. Lett., 57 (2) (2002), 355.
• [25] HASAN M.M., HASEEB A.S.M.A., SAIDUR R., Opt. Mater., 32 (2010), 690.
• [26] SANI S.R., ALI A.M., JAFARI R., Physica B, 406 (2011), 3382.
• [27] FOX M., Optical Properties of Solids, Oxford University, Press, England, 2005.
• [28] DEOTALE A.J., NANDEDKAR R.V., Mater. Today Pro., 3 (2016), 2069.

Uwagi

Opracowanie rekordu ze środków MNiSW, umowa Nr 461252 w ramach programu "Społeczna odpowiedzialność nauki" - moduł: Popularyzacja nauki i promocja sportu (2020).